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AMAT / APPLIED MATERIALS
CENTURA
System Process: DPHe ESC chuck wafer with in vendor specs (2) Load ports (4) Chambers 2011 vintage.
5
AMAT / APPLIED MATERIALS
CENTURA
Etcher, 12" OEM Process Transfer chamber (3) Chambers (2) AC Racks Loader Missing parts.
8
AMAT / APPLIED MATERIALS
CENTURA
Etcher, 12" EFEM MP 40B-GL ADVANCED THERMAL Chiller (3) Workstations (3) Chambers (A, B, C) AC Rack
2
AMAT / APPLIED MATERIALS
CENTURA
Metal etcher Mainframe (2) DPS Chambers (Poly and metal) (2) R2 Chambers (2) ALCATEL / ADIXEN / PFEI
5
AMAT / APPLIED MATERIALS
CENTURA
Etcher, 12" CIM: SECS / GEM Process: RTP Factory interface: (3) FOUPs (3) Vacuum pumps 2006 vintage.
4
AMAT / APPLIED MATERIALS
CENTURA
Poly etcher Platform type: ETCH Centura I_Phase 2 Load lock: WBLL Wi Auto rotation HP Robot Position
6
AMAT / APPLIED MATERIALS
CENTURA
System (5) AMAT Enabler (3) Chamber Enabler (1) Generator rack (1) EFEM with YASKAWA Robot VHP Robot
4
AMAT / APPLIED MATERIALS
CENTURA
Poly etcher, 12" (3) Poly chambers (1) Axiom chamber (1) EFEM with KAWASKI TDK TAS Loadport VHP Robo
5
AMAT / APPLIED MATERIALS
CENTURA
Oxide etcher, 12" (3) Enabler chambers RF Generator rack AC Rack Missing parts: GHW50A (3) B5002 EF
9
AMAT / APPLIED MATERIALS
CENTURA
EPI System, 6" Narrow body load lock HP Robot (2) ATM EPI Chambers Gas panel: No.
4
AMAT / APPLIED MATERIALS
CENTURA
Etcher, 12" Process: Oxide (3) Poly chambers (1) Axiom chamber (1) EFEM with KAWASAKI Robot 2010 vin
6
AMAT / APPLIED MATERIALS
CENTURA
PVD system (2) PCVD chambers Standard body alum (4) Finger heaters with back side gas Orienter / Deg
5
AMAT / APPLIED MATERIALS
CENTURA
RTP Xe+ System RP Type TPCC M/F Toxic Wide body loadlock ISSG 2000 vintage.
5
AMAT / APPLIED MATERIALS
CENTURA
System Multi-station wafer handler (4) DPN HT Chambers, 12" AC and EQ Rack, 12" (2) EDWARDS / AMAT I
6
AMAT / APPLIED MATERIALS
CENTURA
Etchers, 12" EFEM Process: Oxide (5) AMAT Enabler (3) Chamber enabler (1) Generator rack AC Rack (CV
2
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