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KLA / TENCOR 6420 Surfscan #293706991

KLA / TENCOR

6420 Surfscan

Particle inspection system, 2"-8" Substrate thickness: 12 mm Single puck handling from single casset
8
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KLA / TENCOR 6420 Surfscan #293754994

KLA / TENCOR

6420 Surfscan

Non-patterned surface inspection system, 4"-8" Defect sensitivity: 0.12 micron at 95% capture Haze s
27
KLA / TENCOR 6420 Surfscan #293754476

KLA / TENCOR

6420 Surfscan

Non-patterned wafer film surface analyzer, 6" Automatic wafer handler Defect map and Histogram 2D Si
28
KLA / TENCOR 6420 Surfscan #293742067

KLA / TENCOR

6420 Surfscan

Defect inspection system, 6" Upgraded from 6220.
40
KLA / TENCOR 6420 Surfscan #293750854

KLA / TENCOR

6420 Surfscan

Non-patterned surface inspection system, 4"-8" Defect sensitivity: 0.12 microns Haze sensitivity: 0.
40