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ULVAC MLX-3000N #9279394

ULVAC

MLX-3000N

Sputtering system Multi chamber type (C to C) Substrate size, 6" Diameter (2) Cassette-chambers (2)
113
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ULVAC MLX-3000N #9271145

ULVAC

MLX-3000N

Sputtering system Size: 8φ (4) Rooms: (3) Rooms for sputtering (1) Room for etching 1999 vintage.
142
ULVAC MLX-3000N #9236603

ULVAC

MLX-3000N

Sputtering system Si wafer Process gases: Argon, O2, Ni, Ta, Cr, Cu Target: Cu O2 Chamber S3 exists
216
ULVAC MLX-3000N #9280607

ULVAC

MLX-3000N

Sputtering system 2000 vintage.
215
ULVAC MLX-3000N #9266533

ULVAC

MLX-3000N

Sputtering system, 8" 1999 vintage.
119
ULVAC MLX-3000N #9156850

ULVAC

MLX-3000N

Sputtering system 1998 vintage.
154