판매용 중고 DISCO DGP 8760 + DFM 2700 #9230369

Wafer backside grinder, 12" Consumption rate: During warming up: 450 L/min (ANR) / Less Average during processing: 700 L/min (ANR) / Less During maximum flow: 1300 L/min (ANR) / Less Polishing residue collector: Pressure: 0.3 to 0.5 MPa Variation: 0.03 MPa / Less Rate: 50 L/min / Higher (A.N.R.) Water: Wheel coolant & cleaning (Deionized) Pressure: 0.3-0.4 MPa Flow rate: Maximum: 25 L/min / Higher Temperature: +2°C Spindle & chuck table coolant: Water used: City water / Tap water Pressure: 0.2 - 0.3 MPa Flow rate: 9.5 L/min / Higher Temperature: 20°C-25° C Vacuum unit: Water used: City water / Tap water (Meeting: Water quality standard) Pressure: 0.05 - 0.45 MPa Flow rate: 2.0 L/min (Temperature: Supply water 30° C / Lower) 1.5 L/min (Temperature: Supply water 25° C / Lower) 1.0 L/min (Temperature: Supply water 20° C / Lower) Polishing residue collector: Pressure: 0.2-0.3 MPa Flow rate: 4 L/min / Higher Exhaust: Displacement: 4 m³/min (Connection: Main body) Static pressure: -60 Pa / Higher (Connection: Main body) Connection port: Vacuum unit: ID 38 mm x OD 45.8 mm Polishing residue collector: ID 101.6 mm x OD 113.0 mm Power requirements: 200 VAC 10 %, 3 Phase, 50/60 Hz During warm up: 2.8 kW During processing: 8.4 kW Maximum power: 26 kVA 2006 vintage.