판매용 중고 KLA / TENCOR 6420 Surfscan #293754994

Non-patterned surface inspection system, 4"-8" Defect sensitivity: 0.12 micron at 95% capture Haze sensitivity: 0.02 PPM Wavelength: 488 nm Argon laser: 30 mw Blue laser Spot size: 90 µm Scan frequency: 170 Hz Scan pitch: 10, 20, 40 µm Throughput: 120/6" WPH Single puck handling from single cassette or platform XY Coordinates CD ROM Writer Operating system: Windows 98 1996 vintage.