판매용 중고 KLA / TENCOR 6420 Surfscan #293750854

Non-patterned surface inspection system, 4"-8" Defect sensitivity: 0.12 microns Haze sensitivity: 0.02 PPM Wavelength: 488 nm Argon laser: 30 mw Blue laser Spot size: 90 µm Scan frequency: 170 Hz Scan pitch: 10, 20, 40 µm Throughput: 120/6" wph Single puck handling from single cassette XY Coordinates Power supply: Single phase 1996 vintage.