판매용 중고 KLA / TENCOR 6420 Surfscan #293706991

ID: 293706991
웨이퍼 크기: 2"-8"
빈티지: 1996
Particle inspection system, 2"-8" Substrate thickness: 12 mm Single puck handling from single cassette or platform Defect sensitivity surface: 0.12 µm Defect sensitivity polished silicon: 0.12 µm at 95% capture rate Operating system: Windows 98 Illumination source: Argon-Ion laser: 30 mW Wavelength: 488 nm 1996 vintage.
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