판매용 중고 EBARA / EDWARDS Frex 300 #293606134
URL이 복사되었습니다!
확대하려면 누르십시오
ID: 293606134
웨이퍼 크기: 12"
빈티지: 2001
CMD System, 12"
EFEM (Load/Unload):
(4) ASYST Load ports
YASKAWA Electric robot
Position control: Motor + Ball screw
Dry robot
Wafer transfer:
(2) Turn overs (R/L Side)
(2) Pushers (R/L Side)
(4) LTP Linear stages (R/L Side)
(2) Lifters (R/L Side)
Wafer stage (R/L Side)
Wet robot
Polishers:
(2) Top ring normal heads
(2) Buffing tables
Slurry line
Chemical (CL) connection
Return Line
(2) Dressers (R/L Side):
Diamond pallerc type
Disk type: Plate
(2) Tables (R/L Side):
Material stainless steel
Lapping surface
Motor
Cleaner:
1st Cleaner:
(2) Roll scrubs
(2) Megasonics
Wafer roller: Duro 90
SC-1 < 60°C
2nd Cleaner (Pencil and SRD Unit):
(2) Roll scrubs
Megasonic
Poewr control unit:
Power contol
(4) Drivers:
Head rotation
Head swing
Operation contriller(ETC):
Hardware:
VME Bus, board computer
Main CPU: 68 Series 32 Bit
2001 vintage.
아직 리뷰가 없습니다