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ID: 293733191
웨이퍼 크기: 8"
빈티지: 1998
CMP System, 8"
Dual brush and top side brush chambers
Spin dry
Gases: DHF, NH4OH
(2) Chemical cabinets
MX-7500 TBC Brush load cell amp
PRETECH Fine jet Generator
AC Transformer
FA-21000A PC
YASKAWA SGD Drive
HF Circulation filter
UT3-F3AE-B touch panel
HFC-VWE Hitachi inverter
RORZE Curt-2032-0
Slurry flow controller interface
Power box
IFC-7300-001 Distribution box
Operating system: Windows NT
1998 vintage.
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