판매용 중고 AMAT / APPLIED MATERIALS Reflexion LK #9005426

Copper CMP system, 12" Base System: Reflexion LK 4 head, 3 platen polishing system, Dry in Polisher Skins: Dark P1, P2, P3, and P4: 4910 compliant Gap Wash: 120 degree nozzles Load Cup Wafer Exchanger: Enhanced counter balance springs Nova 3090 Ready: None Monitor 1 Location Cart Monitor 2 Location Ergo Arm type Base System Light Tower: Factory Interface and Polisher Sides Software: LK Software Main system lp3B4.5_29 Factory Interface Front End fb4.9_14 Beta ISRM / RTPC Endpoint system isB3.0_10 RTPC with within wafer uniformity control capability B3.0_11 Interface "A" High speed FDC data transfer: N/A Nova 3090 Insitu Metrology System Software: No use Wafer to Wafer iAPC: no use Within Wafer iAPC: no use Factory interface: WIP Delivery Type OHT or manual delivery FOUP Entegris F300 OHT Light Curtain LIGHT CURTAIN E84 PI O Sensors and Cables: UPPER E84 SENSORS & CABLES E99 Carrier ID TIRIS WITH RF Docked E99 Reading Capability YES Docking Flange Shield YES Frame Configuration 4 WIDE Load Ports Semi Compliant MENV and FIMS Assemblies Load Port Operator Interface STANDARD Load Port Types ENHANCED 25 WAFER FOUP Operator Access Switch YES Platen 1: Platen Type: HIGH SPEED (<= 350 RPM) Endpoint Full Scan Optical ISRM RTPC Endpoint Motor Torque N/A High Pressure Rinse Flow Meter 1350-00195 (4.6 l/min) FLOW METER ASSY 1/2OD 1.6-20LPM PFA Rinse Arms High Pressure/Flow Flow Meter 50-500 ml/min Temperature Control Platen Cooling Water Platen 2: Platen Type: HIGH SPEED (<= 350 RPM) Endpoint Full Scan Optical ISRM Endpoint Motor Torque N/A High Pressure Rinse Flow Meter: 1350-00195(4.6 l/min) FLOW METER ASSY 1/2OD 1.6-20LPM PFA Rinse Arms High Pressure/Flow Flow Meter 50-500 ml/min Temperature Control Platen Cooling Water Platen 3: Platen Type: HIGH SPEED (<= 350 RPM) Endpoint Full Scan Optical ISRM Endpoint Motor Torque N/A High Pressure Rinse Flow Meter: 1350-00195(4.6 l/min) FLOW METER ASSY 1/2OD 1.6-20LPM PFA Rinse Arms High Pressure/Flow Flow Meter 50-500 ml/min Temperature Control Platen Cooling Water Polisher: Polisher Technology SLURRY AND PAD Polishing Head CONTOUR GEN III (0.5 TO 5.0 PSI) Cross Break Pheumatic Box with Reverse Brake Logic Pad Wafer Loss Sensor DARK PAD SENSOR InterPlaten Clean Auxillary clean capability: No ISRM Laser Key Switch Yes Slurry Delivery System 5 x 10 CLC SDS Head 1 Power Cable: 0150-16277 CABLE ASSY, HR1, DRIVER-MOTOR POWER, REF Head 2 Power Cable: 0150-16278 CABLE ASSY, HR2, DRIVER-MOTOR POWER, REF Head 3 Power Cable: 0150-16279 CABLE ASSY, HR3, DRIVER-MOTOR POWER, REF Head 4 Power Cable: 0150-16280 CABLE ASSY, HR4, DRIVER-MOTOR POWER, REF Head 1 Encoder Cable: 0150-16281 CABLE ASSY, 300MM, HR1, DRIVERRESOLVER Head 2 Encoder Cable: 0150-16282 CABLE ASSY, 300MM, HR2, DRIVERRESOLVER Head 3 Encoder Cable: 0150-16283 CABLE ASSY, 300MM, HR3, DRIVERRESOLVER Head 4 Encoder Cable: 0150-16284 CABLE ASSY, 300MM, HR4, DRIVERRESOLVER G4+ UPA Water rated valves: SMC UPA G4+ UPA UPA Firmware: SMC UPA Cleaner Meg: MEGASONICS Delivery with onboard Mix Transducer MEGASONICS Transducer Chemical 1 CLC 1-250 ml/min Chemical 2 CLC 1-250 ml/min Brush box 1: Brush LDM Type: TwoChemInLineMixed Chemical 1: CLC 0~1250 ml/min Chemical 2: CLC 0~1250 ml/min Brush Box Level Spacer: 6mm Spacer for HH alarm reduction Brush Box Shaft Enhanced tolerance shaft Toe In Bracket design to allow for Toe In adjustment Slow drain Plumb to main drain line Brush box 2: Brush LDM Type: TwoChemInLineMixed Chemical 1: CLC 0~1250 ml/min Chemical 2: CLC 0~1250 ml/min Brush Box Level Spacer: 6mm Spacer for HH alarm reduction Brush Box Shaft Enhanced tolerance shaft Toe In Bracket design to allow for Toe In adjustment Slow drain Plumb to main drain line Dryer module: Dryer Type VAPOR DRYER Recovery Module CHEM DELIVERY TANK W/5 WAFER BRACKET Output Station Dampner: Cap is Viton 2010 vintage.