판매용 중고 AMAT / APPLIED MATERIALS Mirra Mesa #9254128

CMP System, 8" Technology: CMP Oxide Wafer shape: Flat / Notch Consumed process materials: Polish slurry Platen 1 pad: IC1010 Platen 2 pad: IC1010 Platen 3 pad: IC1010 Pad conditioner: Diaphragm Pad conditioner head: DDF3 Pad conditioner holder Factory interface options: Cleaner type: MESA (Converted from reflexion) Megasonics Robot type: AMAT / APPLIED MATERIALS In-situ removal rate monitor: Full scan SECS GEM Interface Cassette tank Cassette type: SMIF Open cassette Integrated system basic: FABS 212 FABS Robot blade: Ceramic Cassette type: 25 Slots teflon PFA Platen and head options: Polishing head: (4) TITAN I Heads (4) Retaining rings Pad wafer loss sensor Slurry delivery options: Slurry delivery: Peristaltic pump Slurry flow rate Slurry flow monitor Slurry loop line Slurry loop line A Slurry loop line B Slurry dispense arm DI Water High pressure rinse Safety equipment: Red turn to release EMO button EMO Guard ring Smoke detector Polisher slurry leak sensor Mesa brush leak sensor Umbilicals: Polisher to controller cable: 50 Ft Controller to monitor cable: 50 Ft Factory hookup: Upper exhaust Upper exhaust material: SS Exhaust vent interlock: Upper and lower Upper exhaust connection: 8" Drain manifold:(4) Lines to FAC Drain adapter: NPT Fitting DIW Inlet assy: W/O CDA Regulator User interface: Monitor selection: LCD Monitor Monitor 1 location: LCD Monitor on cart Class 1 cart for monitor 1 Mouse Start stop button: Controller Light tower selection: Controller and FABs Polisher light tower: Controller tower mounting type: Horizon flush mounted Controller tower Controller tower lamp type: Incandescent Light tower: Tower mounting type: Pole mounted Tower lamp type: Incandescent Tower colors sequence Cleaner options: Mesa cleaner Walking beam assemble Megasonic module: Delivery tank Megasonic delivery type: Pressurized Chemical A Chemical B Scrubber module: Scrubber delivery type: Direct feed Brush chemical Scrubber 1 delivery type: Direct feed Brush 2 chemical Brush 1, 2 spray bar SRD Module: SRD Shield SRD Exhaust and drain lines: Single Upper electronic box: UEB Signal tower Pad conditioner head: DDF3 Pad con disk holder Polishing head: TITAN 1 Head Upper Pneumatic assy: UPA Slurry delivery: (2) Slurry line for each platens (6 Slurry line) Endpoint system full scan ISRM (P1, P2) No slurry containment bulkhead No slurry loop line C No Uninterruptible Power Supply (UPS) No delta connection No power connected lamp No AC outlet box No isolation transformer for Mesa No elbow fitting for drain pan No castors No weight distribution plate No internal vacuum ventury No SRD heater lamp Power requirements: Line voltage: 200~230 V Line frequency: 50/60 Hz Delta connection Power lamp Circuit breaker: 200 A Configurable IO: 10 Channels GFI Type: 30 mA 2003 vintage.