판매용 중고 VON ARDENNE SCALA LabX #293826384

Cluster system Range of the SCALA system: Technology: sputter system Application range: ITO (indium tin oxide), SiNx or SiOx (silicon nitride and silicon oxide) Research & piloting: fraunhofer ISE for research, development, pilot production, and wafers Special feature: "wrap-around-free" coating Chambers: transfer module, load lock chamber, buffer chamber, process chamber Transport system: M2, M6, M10, M2 Tray capacity: 9 wafers (3×3) Max. heater temperature 400°C Heater power (C2/C41): 19 kW / 22 kW Length / Width / Height: 7,600 mm / 2,800 mm / 2,850 mm Electrical cabinets: 4,600 mm Mass: approx. 10,000 kg Connected load: 78 kVA Process power consumption: 28 kW Heat load: approx. 15 kW Tray dimensions / weight: 1,000 × 980 mm / 8.5 kg Tray speed: 0.05 – 5 m/min Cooling capacity: Max. 70 kW Cooling water flow rate: Max. 16 m³/h Compressed air supply: 6 – 7 bar, approx. 15 m³/h Process gas supply: O2, Ar, Ar/H2, N2 2019 vintage.