판매용 중고 UNAXIS / BALZERS LLS 502 #9214650

Sputtering system Environmental conditions: Out of operation: Temperature: 10-50°C Relative humidity: 30-80% During operation: Temperature: 18-30°C Relative humidity: 40-60% Facilities requirement: Argon-process: 0.5-1.0 Bar CDA: 6-8 Bar / 87-116 PSI N2 Vent: 1.5-2.5 Bar / 21.7-29.0 PSI N2 Regen (Purge): 1.5-2.5 Bar / 21.7-36.3 PSI PCW: Inlet pressure: 4-7 Bar / 58-101 PSI Outlet pressure: <0.5 Bar Temperature: 15-25°C (2) CTI On-Board 8F Cryo pumps POLYCOLD (Meissener) PFC-400LT Chiller Temperature range: -120°C to -150°C Power supply: 415 V Max full load amp: 8.00 A PFEIFFER DUO 65 Mechanical pump PFEIFFER DUO 035D Mechanical pump (2) Pinnacle power supplies Output power: 15 kW IONTECH MPS-5001 Beam current controller MSU 200 (A 250.1) Power distribution unit Magnetron (Target-cathode): Ti, Al, Cu, GE, AU Unit mass flow controller (UFC): MFC 1: 50cc Ar MFC 2: 20cc Ar Chambers: Load lock chamber (LC): Argon cleaning chamber Main chamber (MC): Deposition chamber Vacuum state: Current MC base pressure: 1.70E-08 Current LC base pressure: 9.30E-08 Current MC ROR: 7.30E-07 Current LC ROR: 1.10E-07 Electrical power: Supply voltage: 3 x 400 / 230 V (3L + N + PE) Supply frequency: 50 Hz and 60 Hz Main ground: <2 Ohm 1996 vintage.