판매용 중고 ULVAC SIV-500F #9269095

Sputtering system UL/CH: Vacuum chamber: AI Chamber Accessories: Door grip opening mechanism (2) Carrier sensors Door sensor O-Ring Isolation valve (Between vacuum and vacuum) Transfer system: Carrier transfer mechanism Carrier 2-stage exchange system Measurements system: ULVAC SW-1 Pirani vacuum gauge SMC ZSE80F-A2L-R-M Atmospheric pressure switch Vacuum pumping system: Rotary pump ULVAC VLP-U3SW Roughing valve SMC XLG-50-M9NA-X62 Vent valve Piping Chamber B: Vacuum chamber: AI Chamber Accessories: Door grip opening mechanism (2) Carrier sensor Door sensor O-Ring Isolation valve (Between vacuum and vacuum) Transfer system: Carrier transfer mechanism Carrier 2-stage exchange system Substrate heating system: Heating mechanism Heater power supply Temperature controller with overheating Thermocouple Measurements system: ULVAC SPU Pirani vacuum gauge SMC ZSE80F-A2L-R-M Atmospheric pressure switch ULVAC SH2 Ionization vacuum gauge Vacuum pumping system: ULVAC CRY0-U12HSP Cryo pump Main valve: No APC Piping Gas inlet system: FUJIKIN FCST1005LUC-4J2-F200-AR MFC Ar: 200 SCCM Gas valve SWAGELOK Type Piping: Stainless steel Etching chamber: Vacuum chamber: AI Etching chamber Accessories: Door grip open mechanism (2) Carrier sensors Door sensor O-Ring Transfer system: Carrier transfer mechanism RF Etching system: RF Etching unit Cooling system: ESC Stage Power supply system: ADTEC TX30-DOOO-10 RF Power supply, 3 kW ADTEC AMVG-3000-NC Match box, 3 kW Rotation chamber: Vacuum chamber: Rotation chamber: Fe and Plated Accessories: (4) Carrier sensors O-Ring Transfer system: Carrier transfer mechanism Carrier rotation mechanism Vacuum pumping system: U12HSP Cryo pump Vacuum piping Main valve: No APC Measurement system: ULVAC SPU Pirani vacuum gauge SMC ZSE80F-A2L-R-M Atmospheric pressure switch ULVAC SH2 Ionization vacuum gauge Gas inlet system: FUJIKIN FCST1005LUC-4J2-F200-AR MFC Ar: 200 sccm Gas valve SWAGELOK Type Piping: Stainless steel Sputtering chamber (Ti): Vacuum chamber: AI Sputter chamber Accessories: Door grip open mechanism (2) Carrier sensors Door sensor O-Ring Transfer system: Carrier transfer mechanism Cathodes system: Magnetron cathode unit Stage system: RF Bias Stage Power supply system: ADVANCED ENERGY Pinnacle DC Power supply, 20 kW ADTEC TX30-DOOO-10 RF Power supply, 3 kW ADTEC AMVG-3000-NC Match box, 3 kW Sputtering chamber (Cu): Vacuum chamber: AI Sputter chamber Accessories: Door grip open mechanism (2) Carrier sensors Door sensor O-Ring Transfer system: Carrier transfer mechanism Cathode system: Magnetron cathode unit (2) ADVANCED ENERGY Pinnacle 20 DC power supplies, 40 kW Compressed dry air system: Filter regulator unit Solenoid valve unit Piping Speed controller Cooling water system: Water supply and return header manifold Cooling water piping Pressure switch Flow meter Structure frame system: SS400 Frame Panel.