익숙한 ULVAC Entron W-200T6 #9003925 판매용

ID#: 9003925

제조사:

ULVAC

포도 수확:

2005

웨이퍼 크기:

8"

장비 세부 정보:

PVD Sputtering system, 8"
Chemical dry pre-clean chamber
Anneal chamber for chemical dry pre-clean chamber
Anneal chamber for post anneal
PVD-Ni chamber (Ring-Ni)
PVD-TiN (Normal)
PVD Co chambers (Normal)

Platform: NCH6000
Process specifications: CDT + Co, Ni silicide process
Front interface: Buffer station (4) ports open cassette type
Gas scrubber

Substrate size: 200 mm
Signal tower: (4) Lights
Standard chambers layout and chamber name

Platform: ENTRON Tandem core NCH6000
With intermediate chamber isolation valve
Compatible with differential pressure transfer (FX has Ar line with needle valve)

(2) Vacuum robots: KEYTRAN4Z
Double hand type with wafer pickup (A12O3)

Main pumps:
(2) SHIMADZU TMP403LM
(2) ULVAC CRYO T6E RS10
(4) BOC EDWARDS Fore pumps

ULVAC C30ZR Cryo compressor
(2) ULVAC G-TRAN BMR2/M-13 Vacuum gauge
(2) ULVAC G-TRAN BPR2/WPB-010-034 Pirani vacuum gauge
(2) Gas feed system: Gas piping for venting (With filter)

Control system:
Operation unit: ULV100U-400 Model 17 liquid crystal display
Control system: MS-IVA

Includes:
EDWARDS Dry pumps
Sputter source
Power supplies
Shielding
Targets
Manuals

2005 vintage.
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