판매용 중고 ULVAC EI-5 #293690584

E-Beam evaporator Batch type Rough pump Compressor Evaporation source: EGL-35M EB-Gun HEARTH 40CC (3) HEARTH 10CC HPS-1000N-100 Vapor deposition power supply Deposition controller: CRTM-9200 Exhaust system: CRYO-U16P Cryo pump C30VR Cryo compressor LR90 Auxiliary pump / dry pump Vacuum gauge: SH2-1 Ionization vacuum gauge G-TRAN Pirani vacuum gauge Operation system: PLC and PC control Touch panel operation 2018 vintage.