판매용 중고 TEL / TOKYO ELECTRON / NEXX Apollo HP #9226608

Sputtering system, 6"-8" Standard vacuum end effector Thin wafer handling: Bernoulli end effector, 8"-12" Upgraded front end, 8"-12" Boost shield kit (2) Etch shield kits Constant etch Pressure Strike (CPS) Miscellaneous parts Backside gas option: 6" Kit: (2) ESC Non-removable rim (3) trays (2 sets of 3 trays) (2) Ground plane assemblies Etch elevator kit (2) ESC Removable rims (3) trays (2 sets of 3 trays), 12" Degas load lock ICP Etch chamber with 8” cryo Deposition chamber: (5) MAGNETRON Power supply: 20 kW Cryo, 8”-10" (2) Deposition chamber shields (2) Etch chamber shields B1 MAGNETRON for Ti Ni Loop MAGNETRONS for Ni (2) B1 MAGNETRON for AuSn B1 MAGNETRON for Au SECS / GEM Included Upgraded G1 MAGNETRON from K11007977 to K11208192 Magnetic array for G1 cathode G1 Spares Fully water sealed MAGNETRON assembly Etch chamber shields Depostion chamber shields (Non RF Bias) (2) ESC (3) Trays (3 trays/set), 6" in base system ESC Size kit, 8": Removable ESC trays, 8" (2 sets of 3 trays) (2) Ground plane assemblies Etch elevator kit T-Cool size kit, 8": T-Cool (3) trays, 8" (Two sets of (3) trays) (2) Ground plane assemblies Etch elevator kit (3) T-Cool (3) trays/set, 8" RF Bias / Stress control option RF Bias compatible shields 2010 vintage.