판매용 중고 PERKIN ELMER 4400 #293754993
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ID: 293754993
Sputtering system
(4) Round targets, 8"
EBARA QDP-80 Dry pump
Cryo pump
Load lock with backing pump
Automated with battery backup for PC and power on circuit
RF Generator: 2 kW with match network
Auto pressure control with baratron
Gas / MFC Size:
Ar / 100 SCCM
O2 / 10 SCCM
N2 / 10 SCCM.
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