판매용 중고 LEYBOLD HERAEUS Z700 #293751412

High vacuum coating system No vacuum pump Gas flow: Range: 0 - 100 sccm Flow controller calibration: N2 (2) PIRANI Vacuum sensors Measurement range : 5x 10^-4 mbar - 1000 mbar Operating voltage : 24 V DC IONIVAC + PIRANI Vacuum sensor Measurement range : 1 x 10^-6mbar - 1000 mbar Operating voltage : 24 V DC (2) Process gas units with pressure controller: Flow controller Valve and inclusive vacuum feed through Substrate drive: (2) Substrate heaters Substrate holder High vacuum sealed rotary feed through MPC-4Q/12G Multi changer lead through Speed range:5-50 RPM Heater circuits Temperature controller Calotte diameter: 630 mm Maximum substrate temperature: 350°C Heating power: 2.5 kW SLOAN EB Gun evaporator: Maximum Power: 8 kW Deflection: 270° (4) Pot crucible Material: Cupper High voltage generator: 10 kVA, DC 2 kV -10 kV Filament transformer Deflection unit (X and Y Direction) Thermal evaporator: Maximum power: 3.6 kVA Electrical cabinet: PC TFT Monitor, 19" PLC Net adapter Electrical connection: Voltage: 3 AC, 400 V / 230 V, +6% / -10% Frequency: 50 Hz ±1% Power supply: 3 Phase, N, PE.