판매용 중고 ENERJET KJL-HV-268-A #9122382

Sputtering system Targets: Torus-10 Chamber: ~28" round vacuum, 14" H (4) Ports in floor of chamber (3 filled with Torus-10 sputtering sources) Front viewport Rear connections for rough lines and gauges Side mounting for cryo pump Chamber lid with lifter has a 8 x 4" wafer plate mounted to it on a rotary feedthru Motor connected to motor controller that spins at 0-24 RPM CTI-8 Cryo pump Compressor not included (cables & hoses included) Tool pumps to 8x10-6 in 2 hours, upper 10-7 overnight Cryo has a gate valve and a conductance control valve (multivane, micrometer at stop to throttle back pumping) (3) Sputter sources (1) Connected to DC power supply: (1) Eratron (1) RF: not connected Targets available: Al, Al/Si (0.5, 1, 2%) C, Cr, Cu, Mo, Si, SiO2, Si3N4, Ta, Ti, TiN, W, W-Ti, WC and Y in various states of use Tool has systems to run: Pump controller to control power to pumps and crossover to high vac Gauge interface and baratron, convection and ion gauges Flow controller for MFCs (100 SCCM Ar, O2, N2) that can be slaved to pressure or ratio'd Cryo controller and cryo temperature gauge Heater controller but heating element has been moved Rotation controller Water flow system, valves and flow switches Interlocked cabinet Fixturing for 4", 3" wafers (2) Chamber shields that can be cleaned (floor of chamber is only part that is not cleaned) Currently in cleanroom.