판매용 중고 CANON / ANELVA C 3040 #293754963

Sputtering system Load and unload chamber with SHIMADZU TMP-1103LMP Turbopump Transfer chamber with BROOKS Magnatran 7 Robot Heating chamber with SHIMADZU TMP-1103LMP Turbopump Blank chamber with SHIMADZU TMP-2003LMC Turbopump CVD Chamber with dual ADTEC AMVG-1000-GR SHIMADZU TMP-2003LMC Turbopump Size: 65mm SP1 Process chamber: Dual DAIHEN RMN-30F15 RF Matches Dual DAIHEN MCB-10A1 RF Match SHIMADZU TMP-1103LMP Turbopump P-100CT-STN Cryopump SP2 Process chamber: SHIMADZU TMP-1103LMP Turbopump P-100CT-STN Cryopump IBE Process chamber: ADTEC AMVG-1000-GH Auto impedance matching unit HIDEN HAL 301 S/2 Spectrometer SHIMADZU TMP-2003LMC Turbopump Double-wide control cabinet: ENI RPG-50 Reactive plasma generator (9) SHIMADZU EI-D1103M Turbopump controllers (2) Cold head power supplies (2) ADTEC AX-1000II RF Plasma generators (2) DAIHEN CMC-10 Tuning control units (3) SHINDENGEN XD-03WB-JR-2 DC Power supplies (3) TDK-Lambda GENH600-1.3 DC Power supplies (3) HV Power supplies (8) ADTEC AXR-600III RF Plasma generators (3) MKS RPG-50 RF Plasma generators Control cabinet: HIDEN HAL 5 RC Interface HIDEN HAL SIMS Interface PFIEFFER DCU Vacuum controller Power cabinet, 200V, 3ph, 50/60Hz, 192FLA Robot control box; (2) ANELVA / SUMITOMO P-876CA-A Cryogenic helium compressors (5) KASHIYAMA SDE120SU-087 Vacuum pumps KASHIYAMA SDE120TXU-223 Vacuum pump KASHIYAMA SDE120S-101 Vacuum pump 2008 vintage.