판매용 중고 BALZERS / EVATEC LLS EVO II #293822746
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ID: 293822746
웨이퍼 크기: 6"
빈티지: 2005
Physical Vapor Deposition (PVD) system, 6"
AC Distribution box
AC Cabinet
(3) External transformers
Eaton 9130 Uninterruptible Power Supply (UPS)
Backing pumps
Polycold system
CDA (Clean Dry Air) system
400V 3L+N+PE Power supply
Operating system: Windows XP
Gases:
Ar
O2
N2
Damaged parts:
One Beckhoff I/O card
2005 vintage.
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