판매용 중고 HITACHI S-4500 Type I #95309

FE SEMs Specifications: Image resolution: At 30 KV: 3.5 nm with a test specimen At 1 KV: 8 nm with a test specimen Magnification: 20x ~ 300,000x Sample stage: Movement: X / Y: 0 ~ 150mm Z: 5 ~ 30 mm Tilt: 0 ~ +45° eucentric tilt Rotation: 360° Sample size: 8" (maximum), 6" square board (maximum) Sample holder: For 6" wafers Sample exchange: Airlock type (8" wafer exchangeable) Stage drive: Drive: X/Y/Z/T/R are motor driven Control: Manual control by joystick Electron optics: Electron gun: Cold field emission source Acceleration voltage (Vo): 0.5 ~ 30 KV Lens system: 360° Objective aperture: 4-openings, selectable / alignable from outside vacuum Stigmator: Electromagnetic octapole type Scanning coil: 2-stage electromagnetic Display system: Imaging signal: Secondary electron image Backscattered electron image (option) X-ray image (option) Scan mode: Normal scan, reduced area, line scan, photo scan, spot scan, analysis scan, dual mag / split screen, oblique CRT: (2) 12" viewing CRTs Frame memory: (2) 1024 x 1024 pixel memory Image processing: Auto image brightness control Auto image contrast control Gamma, dynamic stigmator monitor Auto focus, auto stigma Scan speed: Viewing: TV, 0, 3, 2, 10, 20 s/frame Recording 40, 80, 160, 320 s/frame Electrical image shift: +/- 20 um (at 30 KV, WD = 15 mm) Auto data display: Film number, accelerating voltage, magnification, micron bar, micron scale, date / year Working distance, printed on film automatically Vacuum control: System: Valve control: Full automatic, pneumatic valve control Ultimate vacuum: Electron gun: 10 to 7 Pa Sample chamber: 10 to 4 Pa Vacuum pump: IP1: 60 l/s IP2: 20 l/s IP3: 20 l/s TMP: 340 l/s (2) Rotary pumps: 145 l / min Vacuum gauge: Sample chambwer: PIRANI & PENNING gauge Exchange chamber: PIRANI gauge Utility requirement: Room temperature: 15°C to 25°C Room humidity: 60% or less (RH) Power: Single phase AC 100, 115V +/- 10%, 50 / 60 Hz, 4 KVA.