판매용 중고 STEAG / MATTSON / AST Helios #9219516

Standalone rapid thermal processing (RTP) system, 12" Process: RTA / Spike anneal Process pressure: ATM Process temperature: 115°C Clean room interface: Front interface with (3) loadports Front end configuration: Ball room Platform: Loadport type: TDK Loadport model: TAS300 FOUP Reader: RFID Automation: OHT (E84) GEM Ethernet (HSMS) MMC MATTSON P/N: 3001068 Sequencer MATTSON P/N: 17002560 I/O Controller MATTSON P/N: 17000910 (8) Cooling stations (4) Dummy stations Robot: RORZE 700 Dual arm: Upper arm: Metal blade Lower arm: Quartz blade Process module 1: Wafer pyro MATTSON P/N: 17001048 Lamp pyro MATTSON P/N: 17001040 Gas 3: UFC 8100, N2, 20 SLM Gas 4: UFC 3101, N2, 150 SLM Gas 7: UFC 8100, O2, 20 SLM Gas 8: UFC 3101, O2, 150 SLM Gas 9: UFC 8100, O2, 2 SLM Low temperature controller: No Process quartzware: Standard Process module 2: Wafer Pyro MATTSON P/N: 17001048 Lamp Pyro MATTSON P/N: 17001040 Gas 3: UFC 8100, N2, 20 SLM Gas 4: UFC 3101, N2, 150 SLM Gas 7: UFC 8100, O2, 20 SLM Gas 8: UFC 3101, O2, 150 SLM Gas 9: UFC 8100, O2, 2 SLM Low temperature controller: No Process quartzware: Standard Electrical requirements: UPS: Internal Transformer power: 480 V.