판매용 중고 MATTSON AST 3000 #293667076

ID: 293667076
웨이퍼 크기: 12"
빈티지: 1999
Rapid Thermal Processing (RTP) system, 12" RORZE RR711L1521-3A3-E11-1 Robot included Missing parts: Relay Fuse O2 Sensor P/N: 2D6-0769-020 (3) Support pins ID Reader Sequencer P/N: CURT-0661-2 X-track driver Door controller FCD Board P/N: 2D6-0582-000 (2) Rotation Lasers MCU DC Power supply for 71A1 Power supply 1999 vintage.
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