판매용 중고 TEL / TOKYO ELECTRON Spare parts for Clean Track II / Mark Vz / Mark V #293609150

ID: 293609150
Qty / Pat number / Description (2) / 2504189-0001 / Load plates (3) / 2507445-001 / Load plates HD5 (4) / 2507441-0001 / Stop plates (1) / 2503833-001 / Mirror plate (10) / 2509937 / Integrator alignment targets Type-x (1) / 2506582 / - (1) / 2509413 / - (2) / 2507441 / Stop plate, SVGA-X (1) / - / Lock plate (1) / 2507438 / SVGA-X 7/12/07 plate (1) / 2509940 / Integrator alignment target 98 DPW (1) / DT31254102 / Plate (1) / - / Contol panel slurry speed control (1) / - / AC/DC Relay supply panel (1) / - / Flow meter system A (1) / - / Flow meter, mO2 O24 water L/min (1) / - / Purge gas control panel.
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