판매용 중고 TEL / TOKYO ELECTRON Clean Track ACT 12 #293687465

(4) Coater / (4) Developer system, 12" Carrier stage module: OMRON V700-L22-6 CIDRW Controller 050-003456-1 OMRON V700-L11 ID Link unit (2) TEL / TOKYO ELECTRON TKB3500 Motors (2) TEL / TOKYO ELECTRON TKB3510 Spin motors TEL / TOKYO ELECTRON TAB1610 Board ghost repeater (2) TDK MSE343B CT2939-000009-12 DC Power boxes Carrier stage 1~4: (4) OMRON V064-HAM11-V2 FOUP ID Readers (4) OMRON V640-HS61 CIDRW Heads (4) TDK TK011-90-A-00 Interface boards TEL / TOKYO ELECTRON TKB3520 Loader TEL / TOKYO ELECTRON TKB3500 Loader CRA Motor: YASKAWA SGDV-R90A01A CRA Motor Y axis NSK M-EDC-PS1006AB5F5 CRA Motor Θ axis YASKAWA SGDV-R90A01A CRA Motor Z axis ORIENTAL MOTOR A4840-9015KE CRA Motor Z axis YASKAWA GMPS-A8ACA-TE11 CRA Motor X axis CRA Motor driver: YASKAWA SGMPS-A8ACA-TE11 CRA Motor Y axis NSK M-PS1006KN533 CRA Motor Θ axis YASKAWA SGMJV-A8AAA-TE11 CRA Motor Z axis ORIENTAL MOTOR A7332-042 CRA Motor X axis CRA: TEL / TOKYO ELECTRON Wafer fork OMRON E32-A03-9 2M 60 Mapping sensor OMRON E3X-DA11-S Mapping sensor AMP OMRON E-32-T14L 2M 90 Wafer detect sensor OMRON EX-NT11 Wafer detect sensor AMP PRA1 Motor driver: PANASONIC MSDA043A2A39 PRA1 Motor driver Z axis PANASONIC MSDA3A5A2A42 PRA1 Motor driver X1 axis PANASONIC MSDA3A5A2A42 PRA1 Motor driver X2 axis PANASONIC MSDA3A5A2A42 PRA1 Motor driver X3 axis PRA2 Motor driver: PANASONIC MSDA043A2A39 PRA Motor driver Z axis PANASONIC MSDA3A5A2A42 PRA Motor driver X1 axis PANASONIC MSDA3A5A2A42 PRA Motor driver X2 axis PANASONIC MSDA3A5A2A42 PRA Motor driver X3 axis Spin motor driver: PANASONIC DV83050HA503 2-1 Spin motor driver PANASONIC DV83050HA503 2-2 Spin motor driver PANASONIC DV83050HA503 2-3 Spin motor driver PANASONIC DV83050HA503 2-4 Spin motor driver PANASONIC DV83050HA503 3-1 Spin motor driver PANASONIC DV83050HA503 3-2 Spin motor driver PANASONIC DV83050HA503 3-3 Spin motor driver PANASONIC DV83050HA503 3-4 Spin motor driver CSB chemical cabinet rear: TEL / TOKYO ELECTRON 2-1 PCT PI1 L/E Tank auto air vent TEL / TOKYO ELECTRON 2-1 PCT PI2 L/E Tank auto air vent TEL / TOKYO ELECTRON 2-1 PCT PI1 Bottle press manual switch TEL / TOKYO ELECTRON 2-1 PCT PI2 Bottle press manual switch TALON TECH IPC-5000BF-P 2-1 PI Resist 1 pump 1 TALON TECH IPC-5000BF-P 2-1 PI Resist 2 pump 2 CSB chemical cabinet front: IWAKI HPT-106-2 Tubephragm pump 2-3 COT Resist 1 IWAKI HPT-106-2 Tubephragm pump 2-3 COT Resist 2 IWAKI HPT-106-2 Tubephragm pump 2-3 COT Resist 3 IWAKI HPT-106-2 Tubephragm pump 2-3 COT Resist 4 System controller type 4: MEIDEN UA029/122A Main controller UR629/801A Battery YY24AM RAS TEL / TOKYO ELECTRON E2B115/CPPC2 System TEL / TOKYO ELECTRON E2B0303/NUEC System MEIDEN II01AM-03 System FP-VGA260S-CE5 Main operation panel PRB 1: TEL / TOKYO ELECTRON TOB1093 Chemical I/O board TEL / TOKYO ELECTRON P8A4 PCB A/D conv. TEL / TOKYO ELECTRON TOB1002 Chemical conn board TEL / TOKYO ELECTRON DC-DC Conv. board DIGITAL ELECTRONICS COP. HTK401 Sub operation panel TEL / TOKYO ELECTRON TAB6100 Panel I/O board SHINYEI THT-B12193 Humidity and temperature transmitter SHINYEI THP-B4TW Humidity and temperature transmitter sensor CKD AMC-D-X2 CKD Valve controller AMC-T-X1 CKD Valve controller KONDOH INDUSTRIES EIC-Y93P291-1 FFU Resist pump module: IWAKI HPT-106-2 Tubephragm pump COT 2-2 resist 1 pump IWAKI HPT-106-2 Tubephragm pump COT 2-2 resist 2 pump IWAKI HPT-106-2 Tubephragm pump COT 2-2 resist 3 pump IWAKI HPT-106-2 Tubephragm pump COT 2-2 resist 4 pump IWAKI HPT-106-2 Tubephragm pump COT 2-2 resist 5 pump IWAKI HPT-106-2 Tubephragm pump COT 2-2 resist 6 pump (6) CKD AMD01-X20 COT 2-2 Pump inlet valve resists (6) CKD AMD01-X20 COT 2-2 Auto air vent valve resists PCT 2-1: (2) TEL / TOKYO ELECTRON PCT 2-1 PI Dispense nozzles (2) CKD PCT 2-1 PI Dispense valve nozzles CKD AMDS00-X31 RRC Nozzle valve KOGANEI F-AVP070-8W Solvent bath valve KOGANEI F-AVP070-8W Drain pipe cleaning valve KOGANEI F-AVP070-8W Back rinse 1 valve KOGANEI F-AVP070-8W Back rinse 2 valve KOGANEI F-AVP070-8W EBR Valve F10-622310 EBR Flow control valve ORIENTAL MOTOR A7332-042 ARM1 Motor driver ORIENTAL MOTOR A4840-9015KE Arm1 motor ORIENTAL MOTOR A7332-042 Nozzle exchanger motor driver ORIENTAL MOTOR A4840-9015KE Nozzle exchanger motor (2) ORIENTAL MOTOR DFC1507-A21 Arm2 motor driver ORIENTAL MOTOR A4841-9015KTGE Arm2 motor SMC CXSL15-10 Nozzle lock unlock cylinder SMC ARM2 Up down cylinder SMC MH02-160-X1983 ARM1 Lock unlock cylinder SMC CQSB25-50D-SB9 Chuck up down cylinder SMC Shutter open close cylinder TEL / TOKYO ELECTRON TKB3160 Spinner I/O board Spin servo motor Vacuum chuck (2) OMRON H7CX PI Nozzle 1, 2 Counter COT 2-2: (8) TEL / TOKYO ELECTRON COT 2-2 Resist dispense nozzles (6) CKD AMC-VL-X3 COT 2-2 Resist dispense valves KOGANEI F-SAVP070-12W COT 2-2 Resist 8 dispense valve CKD AMDS00-X31 RRC Nozzle valve KOGANEI F-AVP070-8W Solvent bath valve KOGANEI F-AVP070-8W Drain pipe cleaning valve KOGANEI F-AVP070-8W Back rinse valve KOGANEI F-AVP070-8W Back rinse valve KOGANEI F-AVP070-8W EBR valve F10-622310 EBR Flow control valve ORIENTAL MOTOR A7332-042 Arm1 motor driver ORIENTAL MOTOR A4840-9015KE Arm1 motor ORIENTAL MOTOR A7332-042 Nozzle exchanger motor driver ORIENTAL MOTOR A4840-9015KE Nozzle exchanger motor ORIENTAL MOTOR DFC1507-A21 Arm2 motor driver ORIENTAL MOTOR A4841-9015KTGE Arm2 motor SMC CXSL15-10 Nozzle lock unlock cylinder SMC ARM2 Up down cylinder SMC MH02-160-X1983 ARM1 Lock unlock cylinder SMC CQSB25-50D-SB9 Chuck up down cylinder SMC Shutter open close cylinder TEL / TOKYO ELECTRON TKB3160 Spinner I/O board Spin servo motor Vacuum chuck COT 2-3: (4) TEL / TOKYO ELECTRON Resist dispense nozzles (4) CKD AMC-VL-X3 Resist dispense valves CKD AMDS00-X31 RRC Nozzle valve KOGANEI F-AVP070-8W Solvent bath valve KOGANEI F-AVP070-8W Drain pipe cleaning valve KOGANEI F-AVP070-8W Back rinse valve KOGANEI F-AVP070-8W Back rinse valve KOGANEI F-AVP070-8W EBR Valve F10-622310 EBR Flow control valve ORIENTAL MOTOR A7332-042 Arm1 motor driver ORIENTAL MOTOR A4840-9015KE Arm1 motor ORIENTAL MOTOR A7332-042 Nozzle exchanger motor driver ORIENTAL MOTOR A4840-9015KE Nozzle exchanger motor ORIENTAL MOTOR DFC1507-A21 Arm2 motor driver ORIENTAL MOTOR A4841-9015KTGE Arm2 motor SMC CXSL15-10 Nozzle lock unlock cylinder SMC ARM2 Up down cylinder SMC MH02-160-X1983 ARM1 Lock unlock cylinder SMC CQSB25-50D-SB9 Chuck up down cylinder SMC Shutter open close cylinder TEL / TOKYO ELECTRON TKB3160 Spinner I/O board Spin servo motor Vacuum chuck COT 2-4: (4) TEL / TOKYO ELECTRON Resist dispense nozzles (4) CKD AMC-VL-X3 Resist dispense valves CKD AMDS00-X31 RRC Nozzle valve KOGANEI F-AVP070-8W Solvent bath valve KOGANEI F-AVP070-8W Drain pipe cleaning valve KOGANEI F-AVP070-8W Back rinse Valve KOGANEI F-AVP070-8W Back rinse Valve KOGANEI F-AVP070-8W EBR Valve F10-622310 EBR Flow control valve ORIENTAL MOTOR A7332-042 Arm1 Motor driver ORIENTAL MOTOR A4840-9015KE Arm1 motor ORIENTAL MOTOR A7332-042 Nozzle exchanger motor driver ORIENTAL MOTOR A4840-9015KE Nozzle exchanger motor ORIENTAL MOTOR DFC1507-A21 Arm2 motor driver ORIENTAL MOTOR A4841-9015KTGE Arm2 motor SMC CXSL15-10 Nozzle lock unlock cylinder SMC ARM2 Up down cylinder SMC MH02-160-X1983 ARM1 Lock unlock cylinder SMC CQSB25-50D-SB9 Chuck up down cylinder SMC Shutter open close cylinder TEL / TOKYO ELECTRON TKB3160 Spinner I/O board Spin servo motor Vacuum chuck TEL / TOKYO ELECTRON Transition chill plate TEL / TOKYO ELECTRON Transition stage TEL / TOKYO ELECTRON Low temperature hot plate TEL / TOKYO ELECTRON Low temperature hot plate TEL / TOKYO ELECTRON High exhaust LHP TEL / TOKYO ELECTRON High exhaust LHP TEL / TOKYO ELECTRON Cup washer holder TEL / TOKYO ELECTRON High temperature hot plate TEL / TOKYO ELECTRON Adhesion process station TEL / TOKYO ELECTRON Shuttle TEL / TOKYO ELECTRON Shuttle TEL / TOKYO ELECTRON Chill plate process station TEL / TOKYO ELECTRON Cup washer holder TEL / TOKYO ELECTRON Chill plate process station TEL / TOKYO ELECTRON Chill plate process station TEL / TOKYO ELECTRON Chill plate process station TEL / TOKYO ELECTRON High temperature hot plate Left oven tower: RKC INSTRUMENT REX-B871-NNCS2BPF Temperature controller TEL / TOKYO ELECTRON SSR Board TAB6400 Oven I/O Board TEL / TOKYO ELECTRON Fuse power box Center oven tower: RKC INSTRUMENT REX-B871-NNCS2BPF Temperature controller TEL / TOKYO ELECTRON SSR Board TAB6400 Oven I/O board TEL / TOKYO ELECTRON Fuse power box Right oven tower: RKC INSTRUMENT REX-B871-NNCS2BPF Temperature controller TEL / TOKYO ELECTRON SSR Board TAB6400 Oven I/O Board TEL / TOKYO ELECTRON Fuse power box PRA1 Robot: TEL / TOKYO ELECTRON PRA2 Robot YOKOGAWA URIAG3 Axis motor driver PRB2: TEL / TOKYO ELECTRON TOB1093 Chemical I/O board TEL / TOKYO ELECTRON TOB1002 Chemical conn board TEL / TOKYO ELECTRON TOB1056 PCB A/D Conv. DIGITAL ELECTRONICS CORP. HTK401 Sub operation panel TEL / TOKYO ELECTRON ELECTRON DC Conv. board TEL / TOKYO ELECTRON TAB6100 Panel I/O board TEL / TOKYO ELECTRON DC Board SHINYEI THT-B12193 Humidity and temp transmitter SHINYEI THP-B4TW Humidity and temp transmitter sensor CKD AMC-D-X2 CKD Valve controller KONDOH INDUSTRIES EIC-Y93P291-1 Fan Filter Unit (FFU) COT 2-2 Resist pump module: IWAKI HPT-106-2 Tubephragm pump resist pump CKD AMD01-X20 Pump inlet valve resists CKD AMD01-X20 Auto air vent valve resists COT 2-4 Resist pump module: IWAKI HPT-106-2 Tubephragm pump resist pump IWAKI HPT-106-2 Tubephragm pump resist pump IWAKI HPT-106-2 Tubephragm pump resist pump IWAKI HPT-106-2 Tubephragm pump resist pump (4) CKD AMD01-X20 Pump inlet valve resists (4) CKD AMD01-X20 Auto air vent valve resists TCT 3-1 Resist pump module: IWAKI HPT-106-2 Tubephragm pump resist pump IWAKI HPT-106-2 Tubephragm pump resist pump IWAKI HPT-106-2 Tubephragm pump resist pump IWAKI HPT-106-2 Tubephragm pump resist pump (4) CKD AMC-VL-X3 Pump inlet valve resists (4) CKD AMC-VL-X3 Auto air vent valve resists TCT 3-1: (4) TEL / TOKYO ELECTRON Resist dispense nozzles (4) CKD AMC-VL-X3 Resist dispense valves CKD AMDS00-X31 RRC Nozzle valve KOGANEI F-AVP070-8W Solvent bath valve KOGANEI F-AVP070-8W Drain pipe cleaning valve KOGANEI F-AVP070-8W Back rinse valve KOGANEI F-AVP070-8W Back rinse valve KOGANEI F-AVP070-8W EBR Valve F10-622310 EBR Flow control valve ORIENTAL MOTOR A7332-042 ARM1 Motor driver ORIENTAL MOTOR A4840-9015KE ARM1 motor ORIENTAL MOTOR A7332-042 Nozzle exchanger motor driver ORIENTAL MOTOR A4840-9015KE Nozzle exchanger motor ORIENTAL MOTOR DFC1507-A21 ARM2 Motor driver ORIENTAL MOTOR A4841-9015KTGE ARM2 Motor SMC CXSL15-10 Nozzle lock unlock cylinder SMC ARM2 Up down cylinder SMC MH02-160-X1983 ARM1 Lock unlock cylinder SMC CQSB25-50D-SB9 Chuck up down cylinder SMC Shutter open close cylinder TEL / TOKYO ELECTRON TKB3160 Spinner I/O board Spin servo motor Vacuum chuck DEV 3-2: TEL / TOKYO ELECTRON DEV NTD Nozzle valve CKD AMD01-X1289 DEV NTD Nozzle valve CKD AMD01-X55S-B DEV Rinse nozzle valve CKD AMD01-X55S-B DEV Rinse nozzle valve CKD AMD01-X55S Back rinse nozzle valve SANYO DENKI PMM-MD-53030-10 ARM1 X Axis motor driver Arm1 X axis motor driver SANYO DENKI PMM-MD-53030-10 ARM1 Z Axis motor driver Arm1 Z axis motor driver ORIENTAL MOTOR DFC1507-A21 ARM2 Motor driver ORIENTAL MOTOR A4841-9015KTGE ARM2 Motor SMC ARM2 Up down cylinder SMC Chuck up down cylinder SMC Out cup up down cylinder TEL / TOKYO ELECTRON TKB3130 NDP I/O Board TEL / TOKYO ELECTRON TKB3141 NDP Add on board Spin servo motor Vacuum chuck DEV 3-3: TEL / TOKYO ELECTRON DEV GPV2 Nozzle valve CKD AMD01-X1289 DEV GPV2 Nozzle valve CKD AMD01-X55S-B DEV Rinse nozzle valve CKD AMD01-X55S-B DEV Rinse nozzle valve CKD AMD01-X55S Back rinse nozzle valve SANYO DENKI PMM-MD-53030-10 ARM1 X axis motor driver Arm1 X Axis motor driver SANYO DENKI PMM-MD-53030-10 ARM1 Z axis motor driver Arm1 Z axis motor driver ORIENTAL MOTOR DFC1507-A21 Arm2 Motor driver ORIENTAL MOTOR A4841-9015KTGE Arm2 Motor SMC ARM2 Up down cylinder SMC Chuck up down cylinder SMC Out cup up down cylinder TEL / TOKYO ELECTRON TKB3130 NDP I/O board TEL / TOKYO ELECTRON TKB3141 NDP Add on board Spin servo motor Vacuum chuck DEV 3-4: TEL / TOKYO ELECTRON DEV GPV2 Nozzle valve CKD AMD01-X1289 DEV GPV2 Nozzle valve CKD AMD01-X55S-B DEV Rinse nozzle valve CKD AMD01-X55S-B DEV Rinse nozzle valve CKD AMD01-X55S Back rinse nozzle valve SANYO DENKI PMM-MD-53030-10 ARM1 X axis motor driver ARM1 X Axis motor driver SANYO DENKI PMM-MD-53030-10 ARM1 Z axis motor driver Arm1 Z Axis motor driver ORIENTAL MOTOR DFC1507-A21 ARM2 Motor driver ORIENTAL MOTOR A4841-9015KTGE ARM2 Motor SMC ARM2 Up down cylinder SMC Chuck up down cylinder SMC Out cup up down cylinder TEL / TOKYO ELECTRON TKB3130 NDP I/O Board TEL / TOKYO ELECTRON TKB3141 NDP Add on board Spin servo motor Vacuum chuck TEL / TOKYO ELECTRON Chill plate process station TEL / TOKYO ELECTRON Cup washer holder TEL / TOKYO ELECTRON Chill plate process station TEL / TOKYO ELECTRON High precision hot plate TEL / TOKYO ELECTRON High precision hot plate TEL / TOKYO ELECTRON High precision hot plate TEL / TOKYO ELECTRON Chill plate process station TEL / TOKYO ELECTRON Chill plate process station TEL / TOKYO ELECTRON High precision hot plate TEL / TOKYO ELECTRON High precision hot plate TEL / TOKYO ELECTRON High precision hot plate PHP Pneumatic control panel: YASUNAGA AIR PUMP YP-40VC PHP Unit air purge pump F10-622309 PHP Air purge flowmeter SUNX DP2-80Z Pressure sensor Left oven tower: RKC INSTRUMENT REX-B871-NNCS2BPF Temperature controller TEL / TOKYO ELECTRON SSR Board TAB7100 Oven I/O board TEL / TOKYO ELECTRON Fuse power box Right oven tower: RKC INSTRUMENT REX-B871-NNCS2BPF Temperature controller TEL / TOKYO ELECTRON SSR Board TAB7100 Oven I/O Board TEL / TOKYO ELECTRON Fuse power box PRA2 Robot: TEL / TOKYO ELECTRON PRA2 Robot YOKOGAWA URIAG3 Axis motor driver PR Cabinet: DIGITAL ELECTRONICS COP. HTK401 Sub operation panel TEL / TOKYO ELECTRON TOB1082 Chemical I/O board TEL / TOKYO ELECTRON ELECTRON DC Conv. board CKD AMD01-8BUS-4 Air operation valve Solvent 4 Auto switching: ALLOY PRODUCTS CORP 1A1/X1.2/1700/10 Solvent tank ALLOY PRODUCTS CORP 1A1/X1.2/1700/10 Solvent tank (2) TEL / TOKYO ELECTRON Solvent buffer tanks (2) TEL / TOKYO ELECTRON PCS Solvent pumps Solvent 5 Auto switching: (2) TEL / TOKYO ELECTRON Solvent buffer tanks (2) TEL / TOKYO ELECTRON PCS Solvent pumps COT Cabinet: TEL / TOKYO ELECTRON TOB1082 Chemical I/O board TEL / TOKYO ELECTRON TOB1002 Chemical conn board TEL / TOKYO ELECTRON TOB1056 DC Conv. board COT Cabinet 2: DIGITAL ELECTRONICS COP. HTK401 Sub operation panel TEL / TOKYO ELECTRON TOB1082 Chemical I/O Board SP001 EXT. Dio board TEL / TOKYO ELECTRON TAB1610 Ghost repeater board TEL / TOKYO ELECTRON DC Conv. Board TEL / TOKYO ELECTRON Divide monitor board TEL / TOKYO ELECTRON TTLD19-11 DIO-IF Board 2-1 Solvent 1 Auto switching: ALLOY PRODUCTS CORP 1A1/X1.2/1700/10 Solvent tank ALLOY PRODUCTS CORP 1A1/X1.2/1700/10 Solvent tank (2) TEL / TOKYO ELECTRON Solvent buffer tanks (2) TEL / TOKYO ELECTRON PCS Solvent pumps 2-2 Solvent 2 Supply: (2) TEL / TOKYO ELECTRON PCS Solvent pumps 2-3 Solvent 3 Supply: (2) TEL / TOKYO ELECTRON PCS Solvent pumps 2-15 HMDS: TEL / TOKYO ELECTRON HDMS Supply tank TEL / TOKYO ELECTRON HDMS Drain tank CKD AMD01-X20 HDMS Drain valve CKD AMD01-X21 HDMS Purge valve CKD AMD01-X22 HDMS Buffer tank press valve DEV Cabinet: SMC Solenoid V/V Block (2) TEL / TOKYO ELECTRON PCS Pumps TEL / TOKYO ELECTRON TOB1082 Chemical I/O Board TEL / TOKYO ELECTRON TOB1002 Chemical conn board (2) TEL / TOKYO ELECTRON DC Conv. Boards TEL / TOKYO ELECTRON Divide monitor board TEL / TOKYO ELECTRON NH3 In-line monitor board TEL / TOKYO ELECTRON I/O Board TEL / TOKYO ELECTRON TAB1610 Ghost repeater board SP001 EXT. Dio board AC Power box: TEL / TOKYO ELECTRON PB122-I300-YA-DT3 AC Power box TDK MSE181H Back-up module TDK MSE181H Back-up module Voltage: AC 200/220 V Main circuit breaker rating: 300A Full load current: 260A 3 Phase TCU Temp controller: SMC INR-244-265A-8008 Temperature control unit (7) SMC INR-244-216C Power supplies (9) SMC INR-244-242B Power supplies SMC INR-244-218F Controller (9) SMC INR-244-264A Circulators MELCON TS-10 Temperature & humidity control system SMC CXSL15-50-Y59A Drain guide cylinder TEL / TOKYO ELECTRON TOB1082 Chemical I/O board (6) TEL / TOKYO ELECTRON PRB Rear covers Carrier stage module: OMRON V700-L22-6 CIDRW Controller OMRON V700-L11 ID Link unit (2) TEL / TOKYO ELECTRON TKB3500 Motor I/O boards (2) TEL / TOKYO ELECTRON TKB3510 Spin motor I/O boards TEL / TOKYO ELECTRON TAB1610 Ghost repeater board (2) TDK MSE343B DC Power boxes Carrier stage 1-4: (4) OMRON V064-HAM11-V2 FOUP ID Readers (4) OMRON V640-HS61 CIDRW Heads (4) TDK TK011-90-A-00 Interface boards TEL / TOKYO ELECTRON TKB3520 Loader I/O TEL / TOKYO ELECTRON TKB3500 Loader I/O CRA Motor: YASKAWA SGDV-R90A01A Motor Y axis NSK M-EDC-PS1006AB5F5 Motor Θ axis YASKAWA SGDV-R90A01A Motor Z axis ORIENTAL MOTOR A4840-9015KE Motor X axis CRA Motor driver: YASKAWA SGMPS-A8ACA-TE11 Motor driver Y axis NSK M-PS1006KN533 Motor driver Θ axis YASKAWA SGMJV-A8AAA-TE11 Motor driver Z axis ORIENTAL MOTOR A7332-042 Motor driver X axis CRA: TEL / TOKYO ELECTRON Wafer fork OMRON E32-A03-92M60 Mapping sensor OMRON E3X-DA11-S Mapping sensor AMP OMRON E-32-T14L2M90 Wafer detect sensor OMRON EX-NT11 Wafer detect sensor AMP PRA1 Motor driver: PANASONIC MSDA043A2A39 Motor driver Z axis PANASONIC MSDA3A5A2A42 Motor driver X1 axis PANASONIC MSDA3A5A2A42 Motor driver X2 axis PANASONIC MSDA3A5A2A42 Motor driver X3 axis PRA2 Motor driver: PANASONIC MSDA043A2A39 Motor driver Z axis PANASONIC MSDA3A5A2A42 Motor driver X1 axis PANASONIC MSDA3A5A2A42 Motor driver X2 axis PANASONIC MSDA3A5A2A42 Motor driver X3 axis Spin motor driver: (8) PANASONIC DV83050HA503 Spin motor drivers CSB Chemical cabinet rear: TEL / TOKYO ELECTRON PCT PI1 L/E Tank auto air vent TEL / TOKYO ELECTRON PCT PI2 L/E Tank auto air vent TEL / TOKYO ELECTRON PCT PI1 Bottle press manual switch A/V TEL / TOKYO ELECTRON PCT PI2 Bottle press manual switch A/V (2) TALON TECH IPC-5000BF-P PI Resist pumps CSB Chemical cabinet front: (4) IWAKI HPT-106-2 Tubephragm pump COT Resists System controller type 4: MEIDEN UA029/122A Main controller UR629/801A Battery YY24AM RAS TEL / TOKYO ELECTRON E2B115/CPPC2 System TEL / TOKYO ELECTRON E2B0303/NUEC System MEIDEN II01AM-03 System FP-VGA260S-CE5 Main operation panel PBR: TEL / TOKYO ELECTRON TOB1093 Chemical I/O board TOB1002 Chemical conn board TEL / TOKYO ELECTRON TOB1056 PCB A/D Conv. TEL / TOKYO ELECTRON DC-DC Conv. board Digital Electronics Cop. HTK401 Sub operation panel TEL / TOKYO ELECTRON TAB6100 Panel I/O board Board DC/DC #02 SHINYEI THT-B12193 Humidity & temp transmitter SHINYEI THP-B4TW Humidity & temp transmitter sensor CKD AMC-D-X2 CKD Valve controller KONDOH INDUSTRIES EIC-Y93P291-1 FFU COT 2-2 Resist pump module IWAKI HPT-106-2 Tubephragm pump COT 2-2 resist 7 pump CKD AMD01-X20 COT 2-2 Pump inlet valve resist 7 CKD AMD01-X20 COT 2-2 Auto air vent valve resist 7 COT 2-4 Resist pump module IWAKI HPT-106-2 Tubephragm pump COT 2-4 resist 1 pump IWAKI HPT-106-2 Tubephragm pump COT 2-4 resist 2 pump IWAKI HPT-106-2 Tubephragm pump COT 2-4 resist 3 pump IWAKI HPT-106-2 Tubephragm pump COT 2-4 resist 4 pump CKD AMD01-X20 COT 2-4 Pump inlet valve resist 1~4 CKD AMD01-X20 COT 2-4 Auto air vent valve resist 1~4 TCT 3-1 Resist pump module IWAKI HPT-106-2 Tubephragm pump TCT 3-1 resist 1 pump IWAKI HPT-106-2 Tubephragm pump TCT 3-1 resist 2 pump IWAKI HPT-106-2 Tubephragm pump TCT 3-1 resist 3 pump IWAKI HPT-106-2 Tubephragm pump TCT 3-1 resist 4 pump CKD AMC-VL-X3 TCT 3-1 Pump inlet valve resist 1~4 CKD AMC-VL-X3 TCT 3-1 Auto air vent valve resist 1~4 TCT 3-1 CKD AMC-VL-X3 TCT 3-1 Resist dispense nozzle 1~4 CKD AMDS00-X31 TCT 3-1 Resist 1~4 dispense valve KOGANEI F-AVP070-8W RRC Nozzle valve KOGANEI F-AVP070-8W Solvent bath valve KOGANEI F-AVP070-8W Drain case cleaning valve KOGANEI F-AVP070-8W Back rinse 1 valve KOGANEI F-AVP070-8W Back rinse 2 valve F10-622310 EBR Valve ORIENTAL MOTOR A7332-042 EBR Flow control valve ORIENTAL MOTOR A4840-9015KE Arm1 motor driver ORIENTAL MOTOR A7332-042 Arm1 motor ORIENTAL MOTOR A4840-9015KE Nozzle exchange motor driver ORIENTAL MOTOR DFC1507-A21 Nozzle exchange motor ORIENTAL MOTOR A4841-9015KTGE Arm2 motor driver SMC CXSL15-10 Arm2 motor SMC Nozzle lock unlock cylinder SMC MH02-160-X1983 ARM2 Up down cylinder SMC CQSB25-50D-SB9 ARM1 Lock unlock cylinder SMC Chuck up down cylinder TEL / TOKYO ELECTRON TKB3160 Shutter open close cylinder Spinner I/O board Spin servo motor Vacuum chuck DEV 3-2: CKD AMD01-X1289 3-2 DEV NTD Nozzle CKD AMD01-X55S-B 3-2 DEV NTD Nozzle valve CKD AMD01-X55S-B 3-2 DEV Rinse nozzle 1 valve CKD AMD01-X55S 3-2 DEV Rinse nozzle 2 valve SANYO DENKI PMM-MD-53030-10 3-2 DEV Back rinse nozzle valve ARM1 X Axis motor driver SANYO DENKI PMM-MD-53030-10 Arm1 x axis motor Arm1 z axis motor driver ORIENTAL MOTOR DFC1507-A21 ARM1 Z AXIS MOTOR ORIENTAL MOTOR A4841-9015KTGE Arm2 motor driver SMC Arm2 motor SMC ARM2 Up down cylinder SMC Chuck up down cylinder TEL / TOKYO ELECTRON TKB3130 Out cup up down cylinder TEL / TOKYO ELECTRON TKB3141 NDP I/O Board NDP Add on board Spin servo motor Vacuum chuck DEV 3-3: TEL / TOKYO ELECTRON 3-3 DEV GPV2 Nozzle CKD CKD 3-3 DEV GPV2 Nozzle Valve CKD CKD 3-3 DEV Rinse nozzle 1 valve CKD CKD 3-3 DEV Rinse nozzle 2 valve CKD CKD 3-3 DEV Back rinse nozzle valve SANYO DENKI Arm1 x axis motor driver Arm1 x axis motor SANYO DENKI SANYO DENKI Arm1 z axis motor driver Arm1 Z Axis motor ORIENTAL MOTOR Arm2 motor driver ORIENTAL MOTOR Arm2 motor SMC Arm2 up down cylinder SMC Chuck up down cylinder SMC Out cup Up down cylinder TEL / TOKYO ELECTRON NDP I/O Board TEL / TOKYO ELECTRON NDP Add on board Spin servo motor Vacuum chuck DEV 3-4: CKD AMD01-X1289 3-4 DEV GPV2 Nozzle CKD AMD01-X55S-B 3-4 DEV GPV2 Nozzle valve CKD AMD01-X55S-B 3-4 DEV Rinse nozzle 1 valve CKD AMD01-X55S 3-4 DEV Rinse nozzle 2 valve SANYO DENKI PMM-MD-53030-10 3-4 DEV Back rinse nozzle valve Arm1 x axis motor driver SANYO DENKI PMM-MD-53030-10 Arm1 x axis motor Arm1 Z AXIS Motor driver ORIENTAL MOTOR DFC1507-A21 Arm1 z axis motor ORIENTAL MOTOR A4841-9015KTGE Arm2 motor driver SMC Arm2 Motor SMC Arm2 up down cylinder SMC Chuck up down cylinder TEL / TOKYO ELECTRON TKB3130 Out cup up down cylinder TEL / TOKYO ELECTRON TKB3141 NDP I/O Board NDP Add on board Spin servo motor Vacuum chuck 3-5 CPL Chill plate process station 3-6 CWH Cup washer holder 3-19 CPL Chill plate process station 3-21 PHP High precision hot plate 3-22 PHP High precision hot plate 3-23 PHP High precision hot plate 3-15 CPL Chill plate process station 3-17 CPL Chill plate process station 3-11 PHP High precision hot plate 3-12 PHP High precision hot plate 3-13 PHP High precision hot plate PHP Pneumatic control pane: YASUNAGA YP-40VC PHP unit air purge pump F10-622309 PHP Air purge flowmeter SUNX DP2-80Z Pressure sensor Left oven tower: RKC INSTRUMENT REX-B871*-NNCS2BPF Temperature controller TEL / TOKYO ELECTRON Board conn CT SSR TAB7100 Oven I/O board TEL / TOKYO ELECTRON Fuse power box Right oven tower: RKC INSTRUMENT REX-B871*-NNCS2BPF Temp controller TEL / TOKYO ELECTRON Board conn ct ssr TAB7100 Oven I/O board TEL / TOKYO ELECTRON Fuse power box PRA2 Robot: TEL / TOKYO ELECTRON PRA2 Robot YOKOGAWA URIAG3 PRA2 Θ Axis motor driver DIGITAL ELECTRONICS CORP. HTK401 Sub operation panel TEL / TOKYO ELECTRON TOB1082 Chemical IO board 2 TEL / TOKYO ELECTRON DC-DC Conv. board CKD AMD01-8BUS-4 PR In air operation valve Supply to 2-2 COT: 2-2 Resist 1 2-2 Resist 2 2-2 Resist 3 2-2 Resist 4 2-2 Resist 5 2-2 Resist 6 2-2 Resist 7 Supply to 2-4 COT: 2-4 Resist 1 2-4 Resist 2 2-4 Resist 3 2-4 Resist 4 Supply to 3-1 COT: 3-1 Resist 1 3-1 Resist 2 3-1 Resist 3 3-1 Resist 4 PR Cabinet: DIGITAL ELECTRONICS HTK401 Sub operation panel 20100117-1 TEL / TOKYO ELECTRON TOB1082 Chemical IO board 2 CPC-T0081A-12 TEL / TOKYO ELECTRON DC-DC Conversion board 2981-600310-12 (15) CKD AMD01-8BUS-4 PR In air operation valves Supply to 2-2 COT: (7) 2-2 RESIST Single buffer tank Supply to 2-4 COT: (4) 2-4 RESIST Single buffer tank Supply to 3-1 COT: (4) 3-1 RESIST Single buffer tank COT Cabinet 1: Solvent 4 auto switching: ALLOY PRODUCTS CORP 1A1/X1.2/1700/10 3-2 Solvent 4 tank-1 ALLOY PRODUCTS CORP 1A1/X1.2/1700/10 3-2 Solvent 4 tank-2 TEL / TOKYO ELECTRON 3-2 Solvent 4 buffer tank-1 TEL / TOKYO ELECTRON 3-2 Solvent 4 buffer tank-2 TEL / TOKYO ELECTRON PCS Pump 3-2 solvent 4 pump-1 TEL / TOKYO ELECTRON PCS Pump 3-2 solvent 4 pump-2 Solvent 5 auto switching: TEL / TOKYO ELECTRON 3-2 Solvent 5 buffer tank-1 TEL / TOKYO ELECTRON 3-2 Solvent 5 buffer tank-2 TEL / TOKYO ELECTRON PCS Pump 3-2 solvent 5 pump-1 TEL / TOKYO ELECTRON PCS Pump 3-2 solvent 5 pump-2 COT Cabinet: TEL / TOKYO ELECTRON TOB1082 Chemical IO board 2 CPC-T0081A-12 TEL / TOKYO ELECTRON TOB1002 Chemical conn board cpc-t0002a-11 TEL / TOKYO ELECTRON DC-DC Conv. Board 2981-600310-12 COT Cabinet 2: DIGITAL ELECTRONICS HTK401 Sub operation panel 20100117-1 TEL / TOKYO ELECTRON TOB1082 Chemical IO board 2 CPC-T0081A-12 SP001 Extended DIO BOARD 2981-600514-11 TEL / TOKYO ELECTRON TAB1610 Board ghost repeater #01 HTE-BGR-A-11 TEL / TOKYO ELECTRON DC-DC Conversion board 2981-600310-12 TEL / TOKYO ELECTRON Divide monitor board 001 1981-607608-12 TEL / TOKYO ELECTRON TTLD19-11 DIO-IF Board 2180-020932-11 2-1 Solvent 1 auto switching: ALLOY PRODUCTS CORP 1A1/X1.2/1700/10 2-1 Solvent 1 tank-1 ALLOY PRODUCTS CORP 1A1/X1.2/1700/10 2-1 Solvent 1 tank-2 TEL / TOKYO ELECTRON 2-1 Solvent 1 buffer tank-1 TEL / TOKYO ELECTRON 2-1 Solvent 1 buffer tank-2 TEL / TOKYO ELECTRON PCS Pump 2-1 solvent 1 pump-1 TEL / TOKYO ELECTRON PCS Pump 2-1 solvent 1 pump-2 2-2 Solvent 2 Supply: TEL / TOKYO ELECTRON PCS Pump 1 and 2 2-3 Solvent 3 Supply: TEL / TOKYO ELECTRON PCS Pump 1 and 2 2-15 HMDS: TEL / TOKYO ELECTRON HDMS Supply tank CKD AMD01-X20 HMDS Drain tank CKD AMD01-X21 HMDS Drain valve CKD AMD01-X22 HMDS Purge valve Filter housing: (3) Solvent 1 (2) Solvent 2 (2) Solvent 3 DEV CABINET: SMC SOLENOID V/V Block TEL / TOKYO ELECTRON PCS Pump dev solution-1 pump-1 TEL / TOKYO ELECTRON PCS Pump dev solution-1 pump-2 TEL / TOKYO ELECTRON TOB1082 Chemical IO board 2 CPC-T0081A-12 TEL / TOKYO ELECTRON TOB1002 Chemical conn board CPC-T0002A-11 TEL / TOKYO ELECTRON DC-DC Conv. board 2981-600310-12 TEL / TOKYO ELECTRON Divide monitor board 001 1981-607608-12 TEL / TOKYO ELECTRON NH3 In-line monitor board 2981-600422-11 TEL / TOKYO ELECTRON Board IO #07 2981-600676-11 TEL / TOKYO ELECTRON TAB1610 Board ghost repeater #01 HTE-BGR-A-11 SP001 EXT. Dio board 2981-600514-11 AC POWER BOX: TEL / TOKYO ELECTRON PB122-I300-YA-DT3 AC Power box (2) TDK MSE181H Back-up module 2939-00008-11 Voltage: AC 200/220V Main circuit breaker rating: 300A Full load current: 260A 3 Phase TCU Temperature controller: SMC INR-244-265A-8008 Temperature Control Unit (TCU) SMC INR-244-216C RCP-CH0 ~ CH6 SMC INR-244-242B RCP-CH7 ~ CH15 SMC INR-244-218F Controller SMC INR-244-264A Circulator THC: MELCON TS-10 Temperature & humidity control system Drain tank: SMC CXSL15-50-Y59A Drain guide cylinder TEL / TOKYO ELECTRON TOB1082 Chemical I/O board#02 COT, DEV Cabinet: TEL / TOKYO ELECTRON Dike PRB1, 2: TEL / TOKYO ELECTRON PRB Rear cover (4) COT Double containment tubes (3) Developer bellows tubes N2 Tube (5) TCU Tubes Pio exhaust duct Oven exhaust duct ADH Chamber exhaust duct Base ass'y (4) PRB Rear bottom covers (4) Spin bottom tube covers (4) Spin bottom covers Exhaust monitor module (45) Adjust foots Solvent tank 2010 vintage.