판매용 중고 LEYBOLD APS 1104 #293679478

Evaporator LEYCOM IV Plant control POLYCOLD PFC 1102 Cooling system Meissner trap D65B Rotary vacuum pump WS501 Roots vacuum pump Diffusion pump Process gas oxygen Substrate drive Carrier for single dome substrate holder Plasma Ion Assisted Deposition Source (PIAD) Advance plasma source ESQ12 E-Beam gun (crucible 1-pocket (ring groove)) ESV14 E-Beam gun (crucible 4-pocket) Crystal thickness measuring sensor E-gun power supply (HV10.3) non-functional 2004 vintage.