판매용 중고 EVG / EV GROUP 105 #293761363

Bake module, 2"-12" Manual wafer loading Hot plate bake temperature: 150°C SEMI Standard Hot plate cover Simultaneous bake: Up to (9) wafers Up to 100 mm size Bake process: Soft / Post exposure Wafer fixation via vacuum Load and unload pneumatic lift pins Temperature controller Power supply Solvent exhaust connection Standalone.