판매용 중고 EATON NOVA / AXCELIS NV GSD-HE #9163722

High energy implanter, 8" Wafer type: Notch Vaccum system: Cryo compressor: CTI 9600, CTI 8500 Beamline cryo pump 1: OB8 (P2) Beamline cryo pump 2: OBIO (P3) AMU Turbo pump: TMP1000 (P8) Terminal rough pump: EBARA LINAC Rough pump: EBARA Endstation rough pump: EBARA Vacuum controller: HCIG IG3: Ion gauge Endstation info: (4) Cassettes Dummy wafer: Integrated "Dummy wafer" Fill-In capability Wafer handling system: In-Air / In-Vacuum high throughput Particle filter system: Class 1, UPLA Filtered Implant angle capability: Two axis variable implant angle (+/-11 deg in two axes) (Quad) Process disk spindle: GSD series process disk (installed ) Beam monitoring system: Real-time patented Dose Control Process Disk: Non silicon coated process disk Process disk cooling interlock: Yes Terminal info: Gas box option: Modular gas box / Four string gas box options Extraction PS: 90KV Extraction voltage monitor: Yes Ion source: ELS Type Extraction electrode: (3) Axis extraction electrode (Sen type) AMU system: Triple indexed mass analysis magnet and power supply Injector faraday: Injector flag faraday Dry transformer LINAC and FEM: (10) Power supplies: 3kW 13.56 MHz (10) High energy resonator cavitites and electrodes (5) Upgraded quadrupole lens assemblies and power supplies Resolving faraday: Yes Double indexed final energy magnet (FEM) and power supply: Yes Charge control technology (SEF - Secondary electron flood): No SVR: No Closed-Loop cooling system selection: Cooling system: Sen type Disk chiller: Sen type General Info: Main isolation transformer: Yes Smoke detector: Yes Exhaust flow switch: Yes Light tower: Yes Currently de-installed 2000 vintage.