판매용 중고 EATON NOVA / AXCELIS NV GSD-HE #293615032

Ion implanter, 8" Source module: Gas box: Gas line-1: HP(Ar), Tylan Gas line-2: HP (BF3) Gas line-3: MKS, SDS, PH3 Gas line-4: MKS, SDS, ASH3 Isolation transformer: Oil type Injector module: Source type: ELS / Non-vaporizer Extraction electrode type: 3-Axis electrode BOC EDWARDS STP-2000C EBARA 40X20 Dry pump Facilities module: Machine transformer: Dry type Triple loops chiller AFFINITY CWA-300L-VHE-3LP, P/N:10185 AFFINITY RWA-012T-BE03CB Disk chiller (2) CTI Cryogenic 9600 compressors Linac module: Injector faraday (2) LEYBOLD Turbovac 1000C Turbo pumps EBARA 40X20 Dry pump (4) RFG-3000 (6) RFG-3001 FEM Module: FEM Power: EMS:03-165-2-D, P/N:00473110 EMS: 03-165-2-D, P/N:00473110 FEM Guss: P/N:1182890 Endstation Module: 307 Type controller Ion gauge type: Tube glass 4-Axis In-Air controller 4-Axis Robot controller (Macobot controller) 4-Axis Y-Scan controller 4-Axis Cyro controller Universal dose controller Disk module: CTI-CRYOGENIC OB-8 CTI-CRYOGENIC OB-10 CTI-CRYOGENIC OB-250F EBARA 40X20 Dry pump Flag faraday In-Vac arm Wafer holder Gyro Linear drive Disk faraday Resolver faraday Disk model: Si coating Rotary motor type: Belt drive Vacuum cassette elevator type: GRTV Notch finder Dummy cassette Load buffer E/S Elec rack / Quad console module: Quad rack module Quadruple power supply (5) Quadruple power supplies E/S Elec rack module:1178580 Cell controller model: 133, P/N:1191297 Ground DI DI Power conditioner Gyro controller Loadlock controller DEXON / PN:19077660 / Flow hood.