판매용 중고 EATON NOVA / AXCELIS GSD 200E2 #9312589

High current implanter, 8" SMIF System: Interface Handle systems: SDLC System In air robot Load buffer Dummy buffer Vacuum cassette Tilt stand Notch aligner Process chamber: Batch Disk 13-pads, 8" In-vacuum arm Wafer holder AFFINITY Disk chiller AFFINITY Single close loop cooling chiller Vacuum system: CTI-CRYOGENICS 8200 Cryo compressor CTI-CRYOGENICS 9700 Cryo compressor CTI-CRYOGENICS OB 8 Beam line cryo pump CTI-CRYOGENICS OB 10 Beam line cryo pump No process cryo pump EDWARDS STP-2203C Source high vacuum pump EDWARDS QDP Rough pump HCIG Vacuum gauge controller End station: 4-Cassette table Wafer aligner type: Notch aligner Wafer handling system: In air / In vacuum high throughput Particle filter system: Class 1 UPLA Implant angle: 2-Axis variable: ± 7° Quad implant capability Process disk spindle: GSD Direct drive Beam monitor system: In situ beam potential monitor Real-time patented dose control Real-time beam profiler (1D) Process disk: Silicon coated UHD small radius fences Process disk cooling interlock ASYST LTP2000 SMIF Interface Gas box option: Modular gas box / 4-Strings option 1 HP (MFC Unit 1660) 3 SDS (MFC Unit 1662) Extraction power supply: 90 keV Extraction voltage monitor Vaporizer Ion source: ELS Source bushing: Extended life bushing Extraction electrode: Type 34 Source injection kit AMU System: Triple index Post accel power supply: 90 keV Post accel electrode Terminal isolation transformer: Dry transformer Bias aperture assembly Flag faraday Secondary electron flood gun: PEF Control UPS Main isolation transformer Smoke detector Exhaust flow switch Water leak sensor Light tower No real-time particle detection Earthquake retrofit SUN Solaris operator workstation Hard Drive Drive (HDD) LCD Monitor, 21" SECS I and SECS II Protocols GEM Interface and Ethernet ports CIM: Solaris 2006 vintage.