판매용 중고 EATON NOVA / AXCELIS GSD 200E2 #9026352

Ion implanter, 8" (13) Batch wafers Application process: High current implanter System software Version: 4.9.1 (Sun OS) Utility gas: CDA, Machine air, Swagelok, 3/8" Sus male Ar, Process air, Swagelok, 3/8" Sus male PN2, Process vent, Swagelok, 3/8" Sus male GN2, Purge vent, Swagelok, 3/8" Sus male Exhaust: (2) Environment, GEX, 500 CFM, 8" PVC, has exhaust hood (2) RP Exhaust, SEX, 2" Sus, has exhaust hood (1) Cyro pump, SEX, 20 CFM, 2" Sus, no exhaust hood (1) Gas cabinet, SEX, 500 CFM, 8" PVC, 1, has exhaust hood (1) Source cleaning exhaust, SEX, 65, 2.5" PVC, no exhaust hood Cooling water: (2) RP Cooling water, 14~28 psi, 5~8 GPM, 24º C, 3/8" (1) City water, 55~75 psi, 7.5 GPM, 24º C, 1", to DI cooling water (1) Cyro compressor, 14~28 psi, 5~8 GPM, 24º C, 1" Endstation module: (4) Cassette table (280 mm) (2) Load buffer (1) Dummy buffer Mini-environment: Synetics ATM Robot: OK Notch/Flat finder: Notch type Vacuum cassette: STD (VESPEL Support pin) Load port interface: N/A Beam profile oscilloscope: Tektronix TDS 210 Cell controller/version: Cell 177 (1915690, Rev. A) Loadlock type: STD Main SUN computer: Sparc station 5 Main monitor: 17", LCD Second SUN computer: Yes (function unknown) Second SUN monitor: N/A Tape reader: NG Printer: N/A Process module: Disk: Seg Si Coated, P/N: 11027061 Flag faraday with SRA: OK (11019550) Electron/plasma shower: P-shower (1190160) Plasma shower filament PS: Yes (EMS) Bias aperature: Yes Shower gas panel: Yes (STEC SEC-7320, 2 sccm) Water bleed MFC: MKS (Type: 1150) Ar/Xe Beamguide gas: Motor control In-Vac arm: Yes Wafer holder: Yes Disk wafer clamp/unclamp: Roller type (1180270) Gyro/Angle: NV-GSD-100 Linear drive: OK Rotary drive: Direct drive HYT Sensor: Yes (20SX) Beam profile holes: N/A Disk RGA Port: Yes Resolving housing RGA Port: N/A Wafer charge sensor: Yes P-Shower charge monitor: Yes P-Shower disk current: Yes Loadlock controller type: 4-Axis DI In-air wafer xfer controller: 4-Axis DI Robot controller: 4-Axis DI Beamline module: HV Power supply: Hitek Power Inc. HV Stack: OL8000/104/30, 100 KV Post Accel. Volt: N/A Extraction suppression PS: Glassman, PS/NV-15NN33, 2200158 AMU: Acelis AMU PS: EMS 40-150-2-D0816 Hall probe: Axcelis Max. extraction voltage: 90 KeV Beam profiler hole: N/A Decel function: N/A Beamline purge kit: N/A Source module: Source head/vaporizer: ELS/No vaporizer Filament PS: EMS 10-60 Arc PS: EMS 150-7 Cathode PS: yes Vaporizer PS: N/A Source magnet: Axcelis Source magnet PS: EMS 25-25 Source bushing: Orange Extraction assembly: Yes Variable resolving aperture: Yes Source ISO Transformer: STD Source injection kit: N/A Source cleaning exhaust: Yes Block type: N/A Gas box module: Gap Loop #1: Ar, HP Gap Loop #2: BF3, SDS Gap Loop #3: AsH3, SDS Gap Loop #4: PH3, SDS Loop #1 MFC: MKS 1179A-14493, Ar, 10 sccm Loop #2 MFC: MKS 1640A-011, BF3, 10 sccm Loop #3 MFC: MKS 1640A-011, AsH3, 10 sccm Loop #4 MFC: MKS 1640A-011, PH3, 10 sccm Vacuum system: P1/Source turbo: A2203C, SEIKO SEIKI P1 Controller: STP-A2203C, SEIKO SEIKI P2/Beamguide Cyro pump: CTI OB-8 P3/V3 Cyro pump: CTI OB-10 P9/Disk Cyro pump: N/A RP1: Remote RP2: Remote IG1: SUZUKI G-75-NTT P IG1: SUZUKI G-75-NTT IG2: SUZUKI G-75-NTT IG3: Stabile ion gauge IG Controller: M/N: 360 Safety options: (4) Smoke detectors VESDA: N/A CES Options: N/A Others: (2) Ground bars Enclosures: OK Ground indication lamp: N/A INO Kit: N/A Drawings/Manuals: N/A SECS/GEM Function: OK System 24V UPS: N/A Light tower: G/Y/R SPC Function: OK Does controller pcomp. algorithm type: Turbo dose DI (1526990) Spare parts: N/A Alignment tools: N/A Sub-systems: Main Transformer: TAVR, 3 Phase, 60 Hz, 50 KVA, Pri. 440 V RP1: Ebara, A70WN RP2: Ebara, A70W Compressor 1: CTI_CRYOGENICS, 9650 Input power: 208 V, 60 Hz, 3 Phase, 95 A, 35 KVA Output power: 90 KeV, 20 mA 2001 vintage.