판매용 중고 EATON NOVA / AXCELIS GSD 200E2 #9021872

HC implanter, 6"-8" 180 KeV Line power: Input power: 208 V, 3 phase, 60 Hz, 92 A, 33 kVA, I/P breaker: 125 A Output power: 180 KeV, 20 mA Endstation module: Mini-environment: Synetics ATM robot: SEN Notch / flat finder: flat Dummy cassette: 2 in 1 Load buffer: 1 Vacuum cassette: domed pin Cassette table: 4 Load port interface: manual Beam profile oscilloscope: Tektronix TDS210 Cell controller / version: MVME 177-03 Load lock type: GSD 100/200, HE Main SUN computer: Sparc Station 5 Second SUN computer: Spare 5 Second SUN monitor: Sun Tape reader: n/a Printer: HP Process module: Disk: none Faraday flag: Y (no burn-through sensor) Electron / plasma shower: secondary electron Plasma shower PS: EMI EMS series Bias aperture: Y Shower gas panel: Y (Ar) Ar / Xe bleed MFC: Unit 5 SCCM In-vac arm: Y Wafer holder: Y Pedestal: Y Gyro / angle: NF-GSD 100, Quad ± 11 deg Linear drive: Y Rotary drive: direct drive HYT: no Beamline module: HV power supply: Advance HV HV stack: OL8000/104/05, 100 kV Prost accel. volt: OL800/104/05, 100 kV Extraction suppression PS: Glassman, m/n: PS/NV-15NN33 AMU: BSL AMU PS: EMI EMS 40-150 Hall probe: AMU Max extraction voltage: 90 KeV, max acc. voltage: 90 KeV Beam profiler hole: extended Y-scan Decel. funcion: n/a Beamline purge kit: Y Beamline turbo: Y Source module: Source head: ELS without vaporizer Filament PS: EMS 10-60 Arc PS: EMS 150-7 Cathode PS: Y Vaporizer PS: present Source magnet: std Source magnet PS: EMS 25-25 Source bushing: std (orange) Extraction assembly: LE-VAE, 33 type Selectable resolving aperture: Y Source ISO transformer: dry Source injection kit: MKS 1150 vapor source MFC Source housing exhaust valve: Y Gas box module: Gas box type: modular Gas loop #1: Ar, HP (external supply) Gas loop #2: BF3, SDS (fitting: 1/4" VCR) Gas loop #3: AsH3, SDS (fitting: 1/2" VCR) Gas loop #4: PH3, SDS (fitting: 1/2" VCR) Loop #1 MFC: MKS, m/n 1179A-14493, 10 sccm, N2, gold finger conn. Loop #2 MFC: MKS, m/n 1640A-011, 5 sccm, AsH3, D-15 conn. Loop #3 MFC: MKS, m/n 1640A-011, 5 sccm, AsH3, D-15 conn. Loop #4 MFC: MKS, m/n 1640A-011, 5 sccm, AsH3, D-15 conn. Vacuum system: P1 / source turbo: Seiko Seiki, STP-A2203C P8 turbo: Leybold 1000C P3 / V3 cryo pump: CTI-10 P9 / disk cryo pump: n/a (flange ready) RP2: Ebara A70W, 200-220 V, 3 phase, 50/60 Hz, 29.5 A IG1: glass, G-75 PIG1: n/a IG2: glass, G-75 IG3: glass, G-75 IG4: n/a IG controller: GP-307 Safety options: VESDA: n/a Smoke detector: Y CES options: n/a Others: Enclosures: OK Ground bars: 5 SECS / GEM function: GEM SPC function: yes Dose controller PComp. algorithm type: standard PComp. Crated 1998 vintage.