판매용 중고 STS / SPTS Multiplex ICP #9277059

Reactive Ion Etcher (RIE), 6" Process: BOSCH Type: Automatic Multiplex ASE-HR, 6” EBARA A30W Dry pump EBARA AAL10 Dry pump No chiller Chamber: BOSCH Process Gas line: MILLIPORE FC2901 4V Viton 600SF6/300C4F8/100N2/100N2 ENI ACG3B-06 / AS310424 Power supply: 300 W, 13.56 MHz RF Supply / Matching unit: ENI ACG3B-06 / AS310424 Power supply: 300 W, 13.56 MHz ADVANCED ENERGY MN3150011-000N SE / AS306817 Power supply: 500 W, 400 KHz Chamber substrate, 6" TRIPOD Mechanical wafer clamp electrode With He backside cooling Process chamber: ICP V2 Unified ISO250 With 100 adapter LEYBOLD MAG2000CT Turbo pump EBARA A30W Dry pump Chamber externals Includes: EDWARDS D14641000 Gauge SMC ZSE6B Pressure switches MKS E27B17DD5B NW16 Bypass pump line Gas box Lower electrode: ICP WTC TRIPOD Lift Substrate clamping / Platen: ICP WTC TRIPOD, 6" Includes: MKS 750B11T 10T MKS 1179A51CR1BV-S: 50 sccm Upper electrode with aperture mounting Upper electrode source: ICP Balun Upper RF enclosure / MU: Balun, 1 kW Chamber lid: ICP Heated RF Generators: Upper: ENI ACG3B-06 / AS310424 Power supply: 300 W, 13.56 MHz Lower: ADVANCED ENERGY MN3150011-000N SE / AS306817 Power supply: 500 W, 400 KHz TTI / THURLBY THANDAR INSTRUMENTS TGP110 Pulse generator Frequency: 10 MHz Bypass pumping: Automatic NW16 Heated foreline: ICP NW40 Pumping line Gasbox: Minimum (4) lines with PFC1 module EBARA A30W Dry pump Gases / MFC Size (sccm) / Seal type / Gas type C4F8 / 300 sccm / Viton / Clean SF6 / 600 sccm / Viton / Clean N2 / 100 sccm / Viton / Clean N2 / 100 sccm / Viton / Clean Loadlock: Carousel vacuum loadlock Carousel loadlock parts: (2) Substrates, 6" EBARA AAL10 Dry pump Power supply: 208 V, 3 Phase, 60 Hz.