판매용 중고 ASM A600 UHV-CP #9239214
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ASM A600 UHV-CP (ASM A600 UHV-CP) 는 반도체 기판 처리에 대한 광범위한 성과를 위해 설계된 고급 고진공 확산 로이자 액세서리입니다. A600 UHV-CP는 단일 구역 냉벽 가열 터보 펌프, 발열 온벽 터보 펌프 및 특허를받은 듀얼 존 퀸치 챔버 (dual-zone quench chamber) 를 사용하여 높은 진공 확산에 뛰어난 성능을 제공합니다. 차가운 벽 터보 펌프는 배치 챔버의 진공 압력을 최대 20 리터/분으로 0.001 토르 (Torr) 미만으로 줄입니다. 통합 된 유도 가열 요소가있는 핫 월 터보 펌프 (hot wall turbo pump) 는 낮은 압력으로 미립자 및 도펀트의 배치 챔버를 효율적으로 청소합니다. 2 구역 퀸치 챔버 (two-zone quench chamber) 를 사용하면 확산 과정에서 샘플을 빠르게 켄치 할 수 있습니다. ASM A600 UHV-CP는 다양한 프로세스 제어 매개변수를 제공하며, 이는 온도 경사, 샘플 냉각 및 확산 대기 제어에 대한 고객의 요구를 충족시키기 위해 조정될 수 있습니다. 또한 로컬 네트워크를 통해 확산 프로세스를 모니터링, 제어하기 위한 원격 머신 인터페이스 (remote machine interface) 와 프로세스 데이터를 수집하고 표시하기 위한 데이터 획득 시스템 (data acquisition system) 도 포함되어 있습니다. A600 UHV-CP (UHV-CP) 는 뛰어난 결과를 달성하는 데 필요한 높은 정확도, 균일성 및 반복성을 제공하는 통합 시스템입니다. 견고한 디자인, 고급 기능, 정교한 모니터링 시스템의 조합으로 인해 ASM A600 UHV-CP (High Vacuum Diffusion Furnace and Accessory) 를 원하는 사용자에게 이상적인 선택이 됩니다.
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