판매용 중고 TEL / TOKYO ELECTRON Expedius #9353489

Wet bench, 12" Process: MRCA Pre-clean Load port Transfer module SD2 SC1 (M/S) DHF Power box O3 Generator Fire extinguisher (3) MIKRO Sonic (2) U02800PMCA U02400PMAM Light tower Fire extinguisher light Alarm rotating light Yellow alarm light Exhaust / Drain box (2) Exhaust assy (4) Clear plastic cover (Middle) (8) Plastic cover (Top) Water pipe assy Robot track assy (2) Auto L type Foot stool assy KOMATSU GRS-612 KOMATSU AIC-7-12-T1 (2) Air driven pump controllers (6) Step frames (5) White covers Top frame HORIBA Assy Load / Unload module: Transfer module: Tank SD2 (Dryer): Guide material: PCTFE Process bath material: PTFE Cold DIW: 40-60 l/min POU (M/S): Guide material: QUARTZ Process bath material: QUARTZ Temperature: 70°C Proportion: HCL:H2O, 1:500 / 1:1000 Megasonic: SSDM 2800 W Cold DIW: 40-60 L/Min Hot DIW: 40-60 L / Min Heater CEH-480 Concentration monitor SC1 (M/S): Guide material: QUARTZ Process bath material: PTFE Temperature: 55°C Mixing ratio: NH3OH:H2O2:H2O, 2:3:100 Megasonic: SSDM 2800 W FF-20BT1 Pump AIH-124QS CS Heater with WJ Filter: QCCZATM01K, 0.05 µm HORIBA CS-131-0510 Concentration monitor QDR: Process bath material: QUARTZ Cold CIW: 40-60 l/min DHF: Guide material: PCTFE Process bath material: PTFE Cold CIW: 40-60 l/min Mixing ratio: DHF:H2O, 1:25 FF-20BT1 Pump COOLNICS Heater Filter: IHIG01M01K, 0.2 µm CM-210-05 Concentration monitor 2005 vintage.