ID: 293829230
웨이퍼 크기: 12"
Wafer scrubber, 12"
FOUP
EFEM
Oxide removal chemical cabinet
(1) Standard clean chemical cabinet
TBE Chemical cabinet
IPA Dry, 1"-2"
Hydrogen peroxide (H2 O2)
8CH Process Modules-1 (Center robot )
8CH Process Modules-2 (EFEM aligner ).
