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ID: 293767159
빈티지: 1999
Wet station
Process: Split gate
LPD: Spin dryer
(52) WFR Process boats
FEOL BHF Etch
QDR Capable shower
Overflow cold DIW
N2 Bubbles / Shower
Thermoelectric heater / cooler
Heater: Quartz inline, Ozone bubbler
Lower VAT: High temperature H3PO4 hoods
O3/H2O4-HDIW Rinse
O3/H2SO4-CDIW Rinse
Measuring tanks: 35L, H2SO4, 10L, H2O2
1999 vintage.
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