판매용 중고 VEECO / SLOAN DEKTAK 6M #9034870

Surface profiler, up to 6" Includes: Step height repeatability Low-inertia Low-noise sensor (LIS 3) High horizontal and vertical resolution Uses a 12.5 micron diamond stylus (2) Stylus tips Reference thickness gauge Vibration table Programmable stylus (down to 1 mg) Z-Height capability (up to 1 mm) Up to 30,000 data points per scan Windows software interface Specifications: Performance: Sample stage diameter: 150 mm (6 in.) Scan length range: 50 μm to 30 mm X-Y stage translation: 20 mm x 80 mm Theta sample positioning: 360° Vertical data resolution: 1Å max. (@ 65 KÅ range) Vertical range: 262 μm max. (1 mm optional) Step height repeatability: 10 Å, 1σ Data points per scan: 30,000 max. Sample viewing: 2.6 mm FOV (2.6 mm to 0.5 mm FOV zoom option) Stylus tip radius: 12.5 μm (std.) Stylus force range: 1 mg to 15 mg (programmable adjustment) Stylus sensor: LIS 3 (low-inertia sensor) Stylus replacement: Quick-Change tool (std.) System configuration: Microprocessor: Intel Pentium III (monitor optional) User interface: Microsoft Windows 98 Interface method: mouse/keyboard Network card: enables exporting/printing data via local network Power requirements: 115/220 VAC, 50/60 Hz, 5 A Optional features: Printer: color inkjet printer Stress measurement: calculates tensile/compressive thin-film stress on wafers Optional Styli: <1 μm to 25 μm radius tips (high-aspect-ratio tips & super-sharp 50 nm radius tips also available) Calibration standards: 200 Å to 10 μm step height standards (NIST traceable) Vibration isolation table: isolates scan head from external noise Zoom optics: 5 mm to 1 mm FOV Ceramic vacuum chuck: for small samples Extended range: increases vertical range to 1 mm Step detection software: for calculating multiple step measurements Monitor: 15-inch SVGA monitor or 15-inch flat panel w/stand Environmental enclosure: Plexiglas shield protects scan head from dust Standard analytical software: Roughness parameters: Ra, Rq, Rp, Rv, Rt, Rz, max. Ra, max. dev., skew Waviness parameters: Wa, Wq, WP, WV, Wt, max. dev. Step height parameters: avg. step ht., avg. ht., max. peak, max. valley, max. ht., peak to valley, high spot count, peak count Geometry parameters: area, slope, volume, radius, perimeter, bearing ratio Programmable cutoff filter: conforms to ANSI B46.1 2006 vintage.