판매용 중고 KLA / TENCOR RS-55TCA #9191837

Automatic resistivity mapping system Type: Probe B Measurement specifications: Measurement range: <5 mohm/sq to >5 mohm/sq Typical measurement time: 3.5-4.5 Seconds per test site NIST(NBS) Standard wafers corrected to 23°C: ±1 % Measurement repeatability: <0.2% Temperature measurement accuracy: ±0.5°C Temperature measurement repeatability: ±0.5°C Routine check: 1-30 Sites programmable Contour / 3-D map Diameter scan: 49, 81, 121, 225, 361, 441, 625 Sites XY Map: Up to 1200 Sites programmable Probe qualification: (20) Sites P-N Typing Single / Dual configuration options Hardware specifications: Standard wafer sizes: 100, 125, 150 & 200 mm Thick substrate option: 6 mm Thick materials Color HP paintjet printer Dot matrix printer High resolution color monitor Power requirements: 115/230 V, <8 A, 50/60 Hz Vacuum: 500 mm Hg Vacuum: 300 mm Hg Pressure: 40-50 psig (3.3 bar) Pressure: 40-60 psig (3.3 bar) 486/33 MHz Computer 486/25 MHz Computer 110 MB Fixed hard disk drive 40 MB Fixed hard disk drive 44 MB Removable hard disk 3.5" Diskette drive 1.44 MB Capacity Analysis capabilities: Contour, XY, Die 3-D Surface maps Diameter scans Trend charts SQC Charts Histograms Probe qualification procedure File editing & data extraction capability Calibration curves for low-dose monitoring Average, difference & ratio maps Data transfer capabilities: SECS II / RS232 Communication Enhanced SECS II for fully automated operation 1995 vintage.