판매용 중고 KLA / TENCOR / PROMETRIX RS-100 #192556

Resistivity measurement system 300mm single FOUP handler Hardware Configurations Computer P3 733MHz 256MB RAM ◊ 38GB Fixed hard-disk drive 17-inch color VGA monitor or flat-screen LCD CD-ROM drive 3.5-inch diskette drive, 1.44MB capacity Handler 25 slots 12” wafer with 12" ASYST SMIF FL load port SBC: 486E Controller: ESC-218BT Rev. 4.0 Robot: ATM-407B-1-S-CE-S293 Finger Type: Single Fork Alignment System: Camera Factory Automation: E40, E94, E90, E87 Weight: 682 kg (1,500 lbs) Dimensions Height: 183.2 cm (73.1") Width: 134.2 cm (52.8") Depth: 175.3 cm (69.8") Software Configurations OS : Windows NT 4.00.1381 RS-100 Version 2.31.04 20051031 Debug 1.02a RS-100 Resistivity Tester Firmware Measurement Specifications Measurement Range: 5m Ohm/sq - 5M Ohm/sq Absolute accuracy: ±1% of NIST certified range, based on NIST(NBS) standard wafers corrected to 23oC Measurement Repeatability: < 0.2% (1σ), based on KLA-Tencor’s “Probe Qualification Test”, 1 inch test diameter, using the appropriate probe head. Edge Exclusion: 1mm from edge of film, using the appropriate probe head. Temperature Accuracy: ±0.5oC Temperature Repeatability: ±0.2oC Measurement Capabilities Routine check: 1-30 sites programmable XY map: up to 1,200 sites programmable Single or dual configuration capability Analysis Capabilities Contour/3-D map: 49, 81, 121, 225, 361, 441, 625 sites Diameter scan: 49, 81, 121, 225, 361, 441, 625 sites • Probe qualification test: 20 sites, programmable radius Trend and SQC charts Histograms Calibration curves for low dose monitoring Throughput (5-site): 85WPH Data Transfer Capabilities SECS-II, RS232 communication Enhanced SECS-II for fully automated operation 2004 vintage.