판매용 중고 KLA / TENCOR P16+ #9130068

Surface Profiler, 2"-6" Maximum scan length: 80 mm or 200 mm Laterial resolution1: X = 25 nm, Y = 1 µm Microhead 5 SR: Vertical range 327 µm Stylus force 1-50 mg 13 µm, resolution <0.01A 64 µm, resolution <0.04A 327 µm, resolution < 0.20A Microhead 5 LF: Vertical range 130 µm Stylus force 0.05-50 mg 6.5 µm, resolution < 0.01 A 26 µm, resolution < 0.02 A 130 µm, resolution < 0.10 A Microhead 5 XR: Vertical range 1000 pm Stylus force 0.5 - 50 mg 13 µm, resolution < 0.01 A 130 µm, resolution < 0.08 A 1000 µm, resolution < 0.60 A Vertical linearity2: ± 0.5% above 2000 A 10 A below 2000 A Repeatability: 7.5 A or 0.1% (1 s),whichever is greater Reproducibility: 15.0 A or 0.25% (1 s), whichever is greater Scan speed3: 2 µm/sec to 25 mm/sec Sampling rate: 5, 10, 20, 50, 100, 200, 500, 1000 Hz Stylus control: Electromagnetic force compensation Stylus: 4 different radii for long-scan applications—2.0 µm, 5.0 µm, 12.5 µm, 25 µm (coarse). Submicron radius (0.1 - 0.8 µm) for micro surface analysis (fine) Dual view optics (field of view): Side view: 1750 x 1750 µm Top view: 1400 by 1040 µm or optional 900 by 650 µm Camera: Optional digital color camera Relative humidity : 30 - 40% (non-condensing) recommended Temperature : 16°-25° C, rate of change ≤2° C/h Electrical : 90 - 110 V, 50 - 60 Hz 110 - 130V, 50-60 Hz 208 - 260V, 50 - 60 Hz Power requirements: 430 VA Vacuum : 500 mm Hg @ 27 liters/min Floor vibration : ≤250 µ inch/s (6 4 pm/s) RMS, 1-100 Hz Audio noise : ≤80 dB (C weighting scale) Laminar airflow : ≤100 ft/min (30 m/min) down blowing recommended Microprocessor: Pentium®4 2.8 GHz or greater Operating system : Windows® XP-based operating system RAM : 1 GB or greater Disk storage : 80 GB or greater Removable storage : 3.5 inch, 1.4 MB floppy disk drive DVD/CDRW Monitor: 17-inch flat panel LCD Network : PCI ethernet card 2010 vintage.