판매용 중고 KLA / TENCOR Flexus F2320 #293751864
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ID: 293751864
Thin film stress measurement system
Chuck size, 8"
Temperature range: 500°C
Laser scanning to measure stress
Measures and displays stress
Data analysis capabilities
Plotting for Statistical Process Control (SPC)
3-D Map of wafer deflection entire surface
Bi-axial modulus of elasticity and linear expansion
Operating system: MS-DOS.
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