익숙한 KLA / TENCOR Alpha Step 200 판매용
ID#: 9012731
Surface profiler
Model number: 10-02000
Programmable X-Y stage
9" Video monitor
(3) Operating modes:
Manual
Semiautomatic
Automatic
Scanning stylus: 12.5 Micron radius
Zoom video microscope: 40x to 120x Magnification
Vertical resolution: 5 Angstrom (with ±160 k angstrom range, 5 nm with ±160 micro-meter range)
Vertical sensitivity: Measures even the smallest steps, 20 to 50 angstrom
Horizontal resolution: 400 Angstrom
Tracking force: User adjustable, 1 to 25 mg
Maximum sample dimensions: 16.5 mm thickness, 162 mm diameter
Power requirements: 90-130 VAC, 50/60 Hz, 120 VA max.
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제조사:
KLA / TENCOR모델:
Alpha Step 200장비 세부 정보:
Model number: 10-02000
Programmable X-Y stage
9" Video monitor
(3) Operating modes:
Manual
Semiautomatic
Automatic
Scanning stylus: 12.5 Micron radius
Zoom video microscope: 40x to 120x Magnification
Vertical resolution: 5 Angstrom (with ±160 k angstrom range, 5 nm with ±160 micro-meter range)
Vertical sensitivity: Measures even the smallest steps, 20 to 50 angstrom
Horizontal resolution: 400 Angstrom
Tracking force: User adjustable, 1 to 25 mg
Maximum sample dimensions: 16.5 mm thickness, 162 mm diameter
Power requirements: 90-130 VAC, 50/60 Hz, 120 VA max.