익숙한 KLA / TENCOR AIT XP+ 판매용
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ID#: 78831
Patterned wafer inspection system
8" and 12" Wafer Sizes
CE Marked
Install Type: Through-the-Wall
Cassette Interface:
Handler: 300DFF1P; Mfg: 12/01; Schematic: 0002461-000
(1) 12" FOUP
(1) 8" Open Cassette (Asyst VersaPort MOCA 2200)
Status Lamp
VDB
Mfg: VDB0803
208VAC, 50/60Hz, 1-Phase, 3 Wire
Power Requirements: V 200-240, 3-Phase, 5-Wire, 50/60 Hz
2002 vintage.
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제조사:
KLA / TENCOR모델:
AIT XP+장비 세부 정보:
8" and 12" Wafer Sizes
CE Marked
Install Type: Through-the-Wall
Cassette Interface:
Handler: 300DFF1P; Mfg: 12/01; Schematic: 0002461-000
(1) 12" FOUP
(1) 8" Open Cassette (Asyst VersaPort MOCA 2200)
Status Lamp
VDB
Mfg: VDB0803
208VAC, 50/60Hz, 1-Phase, 3 Wire
Power Requirements: V 200-240, 3-Phase, 5-Wire, 50/60 Hz
2002 vintage.