익숙한 KLA / TENCOR 2367 판매용

This KLA / TENCOR 2367 has been sold.

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ID#: 9012614 제조사: KLA / TENCOR 모델: 2367 범주: WAFER TESTING AND METROLOGY 포도 수확: 2006 웨이퍼 크기: 12" 장비 세부 정보: Brightfield inspection system, 12"
Install type: stand-alone

Cassette interface:
(2) Asyst 300mm FIMS LPs
(2) AdvanTag SW CID, G4
E84 for OHT with PIO for G4
E40/E94 HW support
Pre-aligner

Main unit:
Brooks robot
BB visible pixels (um): 0.62, 0.39, 0.25
BB/I-Line/G-Line UV pixels (um): 0.20, 0.16, 0.12
Edge contrast
Array and random modes
High mag review optics
High resolution review CCD
Anti-blooming TDI

IS station:
Status lamp (R, Y, G, B, Audible)
1600 MPSS image computer
Operating system: Windows 2000
Application SW ver: 10.4.507.0.5
GEM/SECS and HSMS

Power line conditioner
Remote power EPO

Facility requirements:
CDA
Vacuum (house)
Power (main): 208 VAC, 16 A, 3 phase, 5 Wire (WYE), 50/60 Hz

Damaged / missing parts:
Assy, CC W backplane, CRTAESCAPE – COBRA, Part No. 0080512-000
Assy, PS2, 36/56VDC 91XX, 93XX, 2367 (exchange), Part No. 0281722-000
FRU, 2366, FPA-base (exchange), Part No. 0111806-000
Assy, FPA arm without A&C apertures, Part No. 0112397-001
Robot (exchange)
Robot controller (exchange)


Can be inspected
2006 vintage.
[+] 더 많은 것을 읽으십시오 [-] 닫기
가격

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