판매용 중고 AMAT / APPLIED MATERIALS VeraSEM #9196915

3D Scanning electron microscope (SEM), 8" Wafer shape: SNNF PP Miraial, 8" No SMIF interface Electron optical system: Electron gun: Schottky emission source (FEI) Accelerating voltage: 300V - 2000V Probe current: Low: 5pA Medium: 10pA High: 20pA Electromagnetic lens: 3 Stages electromagnetic lens Boosting voltage: Beam deflector module Objective lens Scan coil: 2 Stages electromagnetic deflection (X & Y-axes) Magnification: 1,000x to 400,000x (100µm to 0.25µm FOV) Wafer imaging ability: Entire surface of 8" (or 12") wafer Asspect ratio: >14:1 Tilt function: 5 Degrees (4 Directions) Resolution: 3nm (500V) Optical microscope system: COHU CCD Camera: Monochrome Magnification: 16x / 220x (450µm / 6000µm FOV) Wafer imaging ability: Entire surface of 8" (or 12") wafer Workstation: Model: SGI Octane OS: Unix HDD Capacity: 73 GB Memory: 1024 MB SECS/GEM Communication interface Wafer stages: ANORAD X,Y & Z Stages Moving speed: 300 mm/sec Function target: Faraday cup / Resolution target Wafer transfer: Wafer shape ability: Notch / Orientation flat Pre-alignment: Sensing by CCD bar (200/300 mm wafer) External power distribution unit Fun filter unit Uninterruptible power supply: POWERWARE+Plus 18/18 Dry pump load lock: EBARA AA20 Dry pump chamber: EBARA A10S 2000 vintage.