익숙한 ADE / KLA / TENCOR 9520 UltraGage #9245050 판매용

ID#: 9245050

장비 세부 정보:

Dimensional measurement system
ASC200 Controller included

Thickness: ± 1.00µ
Shape (Bow / Warp):
±( 3.00 + 5% of reading) µm
±( 4.00 + 5% of reading) µm
Global flatness: ± 0.50 µm

Integral wafer centering and pre-aligner
Backside contacting chuck

Vacuum chuck diameters:
Small (23.3 mm): 3", 100 mm -150 mm wafers
Large (33.4 mm): 125 mm- 200 mm wafers

Wafer contact materials:
Resting pads: Santoprene
Vacuum chuck: Polyurethane
Nominal wafer thickness range: 250 µm - 750 µm

Auto-loader:
Single / Dual cassette
Sorting: Slot-to-slot / Cassette-to-cassette
Backside contact, horizontal cassett

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