익숙한 ADE / KLA / TENCOR 9520 UltraGage #9245050 판매용

ID#: 9245050

장비 세부 정보:

Dimensional measurement system
ASC200 Controller included

Thickness: ± 1.00µ
Shape (Bow / Warp):
±( 3.00 + 5% of reading) µm
±( 4.00 + 5% of reading) µm
Global flatness: ± 0.50 µm

Integral wafer centering and pre-aligner
Backside contacting chuck

Vacuum chuck diameters:
Small (23.3 mm): 3", 100 mm -150 mm wafers
Large (33.4 mm): 125 mm- 200 mm wafers

Wafer contact materials:
Resting pads: Santoprene
Vacuum chuck: Polyurethane
Nominal wafer thickness range: 250 µm - 750 µm

Auto-loader:
Single / Dual cassette
Sorting: Slot-to-slot / Cassette-to-cassette
Backside contact, horizontal cassette orientation
Wafer contact material: Teflon
Nominal wafer thickness range: 250 µm - 750 µm

Conductivity type: P / N
Edge exclusion:
Thickness: 3 mm / 5 mm
Shape: 3 mm
Nominal wafer thickness: 250 µm - 750 µm
Resistivity: > 0.1-200 Ω cm
Edge gradient: 0.1 µm/mm

Power supply:
Temperature range: 12.7°- 29.4° C (55° - 85° F)
Relative humidity: 55 to 95% non-condensing
Vacuum: 0.6 SCFM, 635 mm (25") Hg ± 10%
Peak usage: 2.8 kVA
Voltage: 100/120/200/208/220/230/240 VAC ± 10%
50/60 Hz, Single phase.
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