판매용 중고 CANON FPA 2500 i3 #293819904

Stepper, 8" Exposure Performance: Normal illumination: 0.40 µm or better SIA illumination: 0.35 µm or better SIB illumination: 0.40 µm or better PFI‑26, 1.025 µmt CD Depth of focus: Normal illumination: ≥ 1.0 µm (range) SIA illumination: ≥ 1.2 µm (range) SIB illumination: ≥ 1.4 µm (range) 0.40 µm L&S Image surface width (Normal illumination): ≤ 50 µm Distortion: Normal illumination: within ±0.07 µm SIA illumination: within ±0.08 µm SIB illumination: within ±0.08 µm Illuminator: Illumination Intensity: Normal illumination: ≥ 550 mW/cm² SIA illumination: ≥ 330 mW/cm² SIB illumination: ≥ 330 mW/cm² Illumination Uniformity: Normal illumination: Within ±1.2% SIA illumination: Within ±1.5% SIB illumination: Within ±1.5% Dose Control Accuracy ≤ ±1.2% Masking Accuracy ≤ ±100 µm Alignment Accuracy: Reticle Rotation Accuracy: ≤ ±0.02 µm Reticle Rotation Repeatability: ≤ ±0.03 µm (range) Alignment Accuracy: HeNe TV AGA: ≤ ±0.07 µm (| m | + 3s) Broad Band TV AGA: ≤ ±0.07 µm ( m | + 3s) Auto Focus: Repeatability: ≤ 0.12 µm (3s) Die By Die Leveling: Repeatability: ≤ 10 µm (3s) Compensation Range: ≤ ±100 ppm XY Stage Accuracy Stepping Accuracy: ≤ 0.06 µm (3s) Scaling: ≤ ±1.0 ppm Orthogonality: ≤ ±1.0 ppm Prealignment Accuracy: Mechanical PA Accuracy: ≤ ±40 µm Throughput: L‑Type Auto Feeder With Die‑by‑Die Leveling OFF: 6" (45 shots): 62 wafers/hour or more 8" (78 shots): 44 wafers/hour or more With Die‑by‑Die Leveling ON: 6" (45 shots): 57 wafers/hour or more 8" (78 shots): 40 wafers/hour or more R‑Type Auto Feeder With Die‑by‑Die Leveling OFF 6" (45 shots): 61 wafers/hour or more 8" (78 shots): 44 wafers/hour or more With Die‑by‑Die Leveling ON: 6" (45 shots): 56 wafers/hour or more 8" (78 shots): 40 wafers/hour or more Reliability: Reticle handling: 50 cycles Wafer handling: 300 cycles Compact chamber: Temperature Control: Booth: 21 °C Stage: 23 °C Cleanliness: within ±0.1 °C 1996 vintage.